Investigations of two-photon polymerization (TPP) with sub-100 nm in the structuring resolution are presented by using photosensitive sol-gel material. The high photosensitivity of this material allows for TPP using a large variety in laser pulse durations covering a range between sub-10 fs and ≈140 fs. In this study, the authors demonstrate TPP structuring to obtain sub-100 nm in resolution by different approaches, namely, by adding a cross-linker to the material and polymerization with sub-10 fs short pulses. Additionally, a simulation and model based characterization method for periodic sub-100 nm structures was implemented and applied in an experimental white light interference Fourier-Scatterometry setup.

Scatterometry is a well-established, fast and precise optical metrology method used for the characterization of sub-lambda periodic features. The Fourier scatterometry method, by analyzing the Fourier plane, makes it possible to collect the angle-resolved diffraction spectrum without any mechanical scanning. To improve the depth sensitivity of this method, we combine it with white light interferometry. We show the exemplary application of the method on a silicon line grating. To characterize the sub-lambda features of the grating structures, we apply a model-based reconstruction approach by comparing simulated and measured spectra. All simulations are based on the rigorous coupled-wave analysis method.

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Surface treatments on surfaces in front of emissive displays are widely used to improve readability under difficult lightning conditions, especially involving sunlight. So‐called anti‐glare (AG) surface treatment tries to reduce specular reflection by diffuse scattering creating a matt finish. At the same time, this surface treatment has a direct impact on the image quality in transmission. For that it is important to tailor these surfaces according to the application requirements but at the same time maintain the image quality of the underlying displays. One of the undesired effects is the so‐called “visual sparkle”, where the displayed image appears to show an uneven luminance distribution especially in areas where solid colors are shown. Great effort and different approaches have been made to characterize this effect. In this work we present a simple, yet effective approach of characterization based on the evaluation of image uniformity with help of grey value histogram extraction and fitting a simple normal distribution..

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