2000
DOI: 10.1063/1.373492
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Spatial variation of ferroelectric properties in Pb(Zr0.3, Ti0.7)O3 thin films studied by atomic force microscopy

Abstract: Imaging of the phase and magnitude of the piezoelectric strain in Pb͑Zr 0.3 , Ti 0.7 ͒O 3 ͑PZT͒ capacitors is performed with an atomic force microscope. The imaging reveals a significant spatial dependence of the ferroelectric properties of both fatigued and unfatigued PZT films. We propose that the variation is related to the domain structure of the PZT. Through the measurement of local piezoelectric hysteresis loops and imaging of the piezoelectric strain, areas are observed in fatigued PZT that exhibit hyst… Show more

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Cited by 47 publications
(26 citation statements)
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“…Vertical PFM ͑VPFM͒ and lateral PFM ͑LPFM͒ imaging methods, used to detect out-of-plane and in-plane polarization components, respectively, have been described in detail elsewhere. [5][6][7][11][12][13][14][15][16][17][18] The modulation voltage ͑typically 0.6 Vrms at 10 kHz͒ was applied to the top electrode of the capacitor using a conduca͒ Author to whom correspondence should be addressed; electronic mail: alexei -gruverman@ncsu.edu tive PFM tip, which was also used to detect the piezoelectric response of the capacitor. Commercially available Pt-coated Si rectangular cantilevers ͑1.0-2.6 N/m force constant͒ have been used in this study.…”
Section: Methodsmentioning
confidence: 99%
“…Vertical PFM ͑VPFM͒ and lateral PFM ͑LPFM͒ imaging methods, used to detect out-of-plane and in-plane polarization components, respectively, have been described in detail elsewhere. [5][6][7][11][12][13][14][15][16][17][18] The modulation voltage ͑typically 0.6 Vrms at 10 kHz͒ was applied to the top electrode of the capacitor using a conduca͒ Author to whom correspondence should be addressed; electronic mail: alexei -gruverman@ncsu.edu tive PFM tip, which was also used to detect the piezoelectric response of the capacitor. Commercially available Pt-coated Si rectangular cantilevers ͑1.0-2.6 N/m force constant͒ have been used in this study.…”
Section: Methodsmentioning
confidence: 99%
“…The measured signal at each point can then be represented as a local on-field and/or off-field hysteresis loop, containing information on local ferroelectric properties and their evolution with bias. After the introduction by Hidaka et al, 156 this technique was rapidly adopted by the community and extensively used to study polarization switching and spatial variations of ferroelectric behavior in PZT, 59,133,134,157,158 BaTiO3, 159,160 Pb0.76Ca0.24TiO3, 161 and more.…”
Section: Iib Local Switching Spectroscopymentioning
confidence: 99%
“…An open loop version of SSPM, in which the feedback is disengaged and the oscillation amplitude in the noncontact regime is collected as the image, has also been reported. 8 In many cases, the morphological information on domain structure and orientation obtained from SPM images is sufficient, and numerous observations of local domain dynamics as related to polarization switching processes, [9][10][11] ferroelectric fatigue, [12][13][14][15] phase transitions, 16 -19 mechanical stresses, 20 etc., have been made. However, analysis of local ferroelectric properties including hysteresis measurements, 21 stress effects in thin films, 22 size dependence of ferroelectric properties, 23,24 etc., requires quantitative interpretation of the SPM interaction.…”
Section: Introductionmentioning
confidence: 99%