2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. El
DOI: 10.1109/leosst.2000.869717
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Spectroscopic ellipsometry and reflectometry: a user's perspective

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Cited by 117 publications
(165 citation statements)
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“…The stability of the plasma deposited coatings was assessed by passing the PBS solution through the cell for 10 min prior to the introduction of the protein solution. After introduction of the protein solution there was an immediate shift from the baseline phase (D) signal which relates directly to a change in thickness at the substrate [39]. Spectroscopic data relating to both the change in D and change in W were recorded.…”
Section: In Situ Ellipsometry Analysis Of Protein Adsorptionmentioning
confidence: 99%
“…The stability of the plasma deposited coatings was assessed by passing the PBS solution through the cell for 10 min prior to the introduction of the protein solution. After introduction of the protein solution there was an immediate shift from the baseline phase (D) signal which relates directly to a change in thickness at the substrate [39]. Spectroscopic data relating to both the change in D and change in W were recorded.…”
Section: In Situ Ellipsometry Analysis Of Protein Adsorptionmentioning
confidence: 99%
“…1͑a͔͒. For thin dielectric films, the power of NCM resides in the ability to quantify intrinsic properties, including film thickness 5 and dielectric constant, 6 with lateral spatial resolution well beyond the limit of conventional ellipsometry, reflectance spectroscopy, 7 and capacitance metrology. 8,9 In two recent papers, 6,10 we have demonstrated the quantitative measurement of the dielectric constant and the thickness of thin insulating films at the nanoscale.…”
Section: Introductionmentioning
confidence: 99%
“…For example, the measurement of reflection and transmission coefficients [3][4][5][6] and the spectroscopic ellipsometry [7][8][9] lead to refractive index, thickness, and extinction factor measurement.…”
Section: Introductionmentioning
confidence: 99%