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Hafnium oxide (HfO 2 ) is one of the most promising high-k materials to replace SiO 2 as a gate dielectric. Here we report material and electrical characterization of atomic layer deposition ͑ALD͒ hafnium oxide and the correlations between the results. The HfO 2 films were deposited at 200, 300, or 370°C and annealed in a nitrogen ambient at 550, 800, and 900°C. Results indicate that deposition temperature controls both the material and the electrical properties. Materials and electrical properties of films deposited at 200°C are most affected by annealing conditions compared to films deposited at higher temperatures. These films are amorphous as deposited and become polycrystalline after 800°C anneals. Voids are observed after a 900°C anneal for the 200°C deposited films. The 200°C deposited films have charge trapping and high leakage current following anneals at 900°C. The 300°C deposited films have lower chlorine content and remain void-free following high-temperature anneals. These films show a thickness-dependent crystal structure. Annealing the films reduces leakage current by four orders of magnitude. Finally, films deposited at 370°C have the highest density, contain the least amount of impurities, and contain more of the monoclinic phase of HfO 2 than those deposited at 300 and 200°C. The best electrical performance was obtained for films deposited at 370°C.

Abstract. Although mitochondrial DNA markers have several properties that make them suitable for phylogeographic studies, they are not free of difficulties. Phylogeographic inferences within and between closely related species can be mislead by introgression and retention of ancestral polymorphism. Here we combine different phylogenetic, phylogeographic, and population genetic methods to extract the maximum information from the Liolaemus darwinii complex. We estimate the phylogeographic structure of L. darwinii across most of its distributional range, and we then estimate relationships between L. darwinii and the syntopic species L. laurenti and L. grosseorum. Our results suggest that range expansion of these lineages brought them into secondary contact in areas where they are presently in syntopy. Here we present the first evidence for introgression in lizards from temperate South America (of L. darwinii mitochondrial DNA into L. laurenti and L. grosseorum), and for incomplete lineage sorting (between L. darwinii and L. laurenti). We show that a combination of methods can provide additional support for inferences derived from any single method and thus provide more robust interpretations and narrow the range of plausible hypotheses about mechanisms and processes of divergence. Additional studies are needed in this group of lizards and in other codistributed groups to determine if Pleistocene climatic changes could be a general factor influencing the evolutionary history of a regional biota.