2017
DOI: 10.1021/acsomega.7b00866
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Spectroscopic Ellipsometry of Nanocrystalline Diamond Film Growth

Abstract: With the retention of many of the unrivaled properties of bulk diamond but in thin-film form, nanocrystalline diamond (NCD) has applications ranging from micro-/nano-electromechanical systems to tribological coatings. However, with Young’s modulus, transparency, and thermal conductivity of films all dependent on the grain size and nondiamond content, compositional and structural analysis of the initial stages of diamond growth is required to optimize growth. Spectroscopic ellipsometry (SE) has therefore been a… Show more

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Cited by 20 publications
(23 citation statements)
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“…Above 2% CH 4 (3, 5 and 6%) the layer was completely uniform, and the crystallite density was not changing, which was the sign of surface reaction limited growth. At this stage, the growth mode was a combination of island growth (Volmer-Weber mode) and layer growth (Frank-van der Merwe mode) [37]. The uniform distribution of diamond grains with a negligible size variation was a confirmation of the uniformity in seeding and nucleation prior to growth.…”
Section: Grain Size and Thicknessmentioning
confidence: 87%
“…Above 2% CH 4 (3, 5 and 6%) the layer was completely uniform, and the crystallite density was not changing, which was the sign of surface reaction limited growth. At this stage, the growth mode was a combination of island growth (Volmer-Weber mode) and layer growth (Frank-van der Merwe mode) [37]. The uniform distribution of diamond grains with a negligible size variation was a confirmation of the uniformity in seeding and nucleation prior to growth.…”
Section: Grain Size and Thicknessmentioning
confidence: 87%
“…Woollam). According to published standard methods [ 47 ], the continuing wavelength ranging from 124 to 1700 nm and selected the angle of incidence of both 65ºand 70º for ellipsometry measurements. We choosed ∆ and Ψ values surveyed at a wavelength of 600–1700 nm for analysis.…”
Section: Methodsmentioning
confidence: 99%
“…At this stage, the lateral growth is sufficient for the diamond islands to coalesce and form columnar crystals, which is in accordance with the van der Drift growth model. [46] For the convention microcrystalline diamond, the film grows in a clear columnar way. However, for the ultra-nanocrystalline/ nanocrystalline diamond, re-nucleation occurs after the first nucleation layer, leading again to the formation of diamond islands and subsequent island coalescence.…”
Section: Growth Of Ultrathin Diamond Filmsmentioning
confidence: 99%