Sprayed films of indium tin oxide and fluorine-doped tin oxide of large surface area

The effect of infrared (IR) radiation on an indium tin oxide (ITO) transparent conductor, prepared by a pyrosol method, was investigated. As-deposited ITO was irradiated with IR in nitrogen gas at atmospheric pressure and temperatures ranging from 50 to 430 °C.Typically, IR irradiation of the as-deposited ITO at 400 °C for 60 minutes reduced the electrical resistance by 60%, raised the work function by 0.5 eV, and enlarged the optical energy band gap by 0.05 V. The resistance was mainly decreased during the initial 10 minutes of irradiation. The results of field emission scanning electron microscopy (FE-SEM) and X-ray diffraction (XRD) analysis showed that the IR irradiation enhanced the crystallinity of the ITO. These results, derived from treatment at atmospheric pressure and using inexpensive equipment, suggest that IR irradiation should be an inexpensive method to reduce the resistance and raise the work function of as-deposited pyrosol ITO.

show abstract

“…The details of the pyrosol method have been previously reported [7][8][9][10]. ITO films were prepared using a reactant solution of 0.…”

Section: Methodsmentioning

confidence: 99%

“…Various methods have been reported for preparing ITO, such as sputtering [4], chemical vapor deposition [5], electron beam deposition [6], and spray pyrolysis [7][8][9][10].…”

Section: Introductionmentioning

confidence: 99%

Increase in the conductivity and work function of pyrosol indium tin oxide by infrared irradiation

et al. 2005

View full text Add to dashboard Cite

show abstract

“…The consequence of impurity/defect centers is the unacceptably large value of absorption observed in some sputtered and thermally evaporated layers 3 of ITO compared with those reported which have been fabricated by other techniques. 4,[8][9][10][11] A plot of two reported sets of data is shown in Fig. 2.…”

Section: Absorption By Defects and Impuritiesmentioning

confidence: 99%

“…Results from sputtered films (dc and magnetron) have already achieved this goal. 4,[8][9][10][11] Sputtering and vacuum evaporation are preferred techniques for film deposition because they are compatible with present semiconductor device technology.…”

Section: Absorption By Defects and Impuritiesmentioning

confidence: 99%

Transparent current spreading layers for optoelectronic devices

Porch

Morgan

Perks

et al. 2004

Journal of Applied Physics

View full text Add to dashboard Cite

In this paper we develop a simple model based on a leaky transmission line to assess the electrical performance of transparent current spreading layers for application to surface light emitting diodes.Figures of merit suitable for device design are obtained and these are applied to a range of material systems reported in the literature. These calculations show that materials with electrical characteristics approaching ultimate performance limits can be achieved. Furthermore, calculations of the electromagnetic absorption of conducting layers show that further improvements should be possible by selecting materials with the highest possible majority carrier mobilities, which enable films of greater thickness to be grown while maintaining high transparency, leading to very low spreading layer resistances. Ways of achieving improved mobility are also discussed.

show abstract

“…Spray CVD (mist CVD or spray pyrolysis) of ITO films is instrumentally cheap and needs substrate heating so that it should be focused to the deposition onto glass or silicon substrates. Table I show reports [1][2][3][4][5][6][7][8][9][10][11][12][13] on spray CVD of ITO films using indium chloride and tin chlorides which are stable and relatively cheap raw materials. Tin (IV) chloride SnCl 4 was used as the tin-doping source.…”

Section: Introductionmentioning

confidence: 99%

Comparison of Indium-Tin-Oxide Transparent Conducting Films Fabricated By Spray CVD Using Different Tin Chlorides

Sawada

Kondo

Aoyama

et al. 2009

Trans. Mat. Res. Soc. Japan

View full text Add to dashboard Cite

Sprayed films of indium tin oxide and fluorine-doped tin oxide of large surface area

Cited by 116 publications

References 12 publications

Increase in the conductivity and work function of pyrosol indium tin oxide by infrared irradiation

Increase in the conductivity and work function of pyrosol indium tin oxide by infrared irradiation

Transparent current spreading layers for optoelectronic devices

Comparison of Indium-Tin-Oxide Transparent Conducting Films Fabricated By Spray CVD Using Different Tin Chlorides

Contact Info

Product

Resources

About