Sputter‐Deposited Amorphous LiCuPO₄ Thin Film as Cathode Material for Li‐ion Microbatteries

Abstract

We report the electrochemical performance of amorphous LiCuPO4 thin films obtained by radio frequency sputtering as a cathode material for Li‐ion microbatteries. The thin films were characterized by X‐ray diffraction, scanning electron microscopy, profilometry and electrochemical techniques. Charge/discharge profiles and cycling performance were evaluated in lithium electrochemical test cells. Cyclic voltammogram of the LiCuPO4 film shows the typical redox reaction peak at ∼ 1.9 V vs. Li/Li+. A discharge capacity of 160 mAh g−1 (50 μAh cm−2) is attained for the first cycle at C/10 to reach a stable capacity of 70 mAh g−1 (22 μAh cm−2) with good stability over 160 cycles. For comparison, the electrochemical performance of a crystalline LiCuPO4 film was investigated. The first discharge could deliver a high capacity of around 375 mAh g−1 at C/10, but the capacity decayed quickly to a low capacity of 11 mAh g−1 over 50 cycles. The results show that the LiCuPO4 amorphous materials can be considered as the exciting cathode candidate for Li‐ion microbatteries.

Facile Deposition of the LiFePO4 Cathode by the Electrophoresis Method

“…12−15 For instance, Sugiawati et al presented a radio frequency sputter deposited thin film of amorphous LiCuPO 4 for Li-ion microbatteries. 16 Liu et al exploited the atomic layer deposition technique to coat LFP. 17 18 There is a review summarizing research on the physical vapor deposition of cathode materials on different types of substrates.…”

“…This is especially beneficial in the case of thin-film materials that enhance active material utilization by facile deposition methods without compromising performance. There are several electrode deposition techniques to prepare thin-film cathodes on a variety of substrates such as chemical vapor deposition, pulsed laser deposition, atomic layer deposition, and magnetron sputtering. − For instance, Sugiawati et al presented a radio frequency sputter deposited thin film of amorphous LiCuPO 4 for Li-ion microbatteries . Liu et al exploited the atomic layer deposition technique to coat LFP .…”

“… 12 − 15 For instance, Sugiawati et al presented a radio frequency sputter deposited thin film of amorphous LiCuPO 4 for Li-ion microbatteries. 16 Liu et al exploited the atomic layer deposition technique to coat LFP. 17 Tiurin et al applied the same technique to prepare a LiMn 1.5 Ni 0.5 O 4 cathode.…”

Optical and Electrochemical Properties of Self-Organized TiO2 Nanotube Arrays From Anodized Ti−6Al−4V Alloy

“…Rechargeable batteries play an important role in powering the electronic devices and in storing energy due to their high energy and power density which are expected to be a solution for the future energy storage requirements (Li et al, 2017). Due to the lack of suitable on-board power sources, the advances in the miniaturization of microelectronics is growing, opening opportunities to explore the both cathode and anode materials as thin-films (Sugiawati et al, 2016) and nanostructured electrodes by utilizing various synthesis and deposition techniques (Djenizian et al, 2011; Pikul et al, 2013; Ellis et al, 2014; Xiong et al, 2014; Sugiawati et al, 2018). Titanium dioxide (TiO 2 ) is a semiconductor material that has been studied extensively in the last few decades due to its chemical stability, non-toxicity and biocompatibility (Morozová et al, 2012; Pansila et al, 2012; Reszczynska et al, 2014).…”

Enhanced Electrochemical Performance of Electropolymerized Self-Organized TiO2 Nanotubes Fabricated by Anodization of Ti Grid

“…Due to their high energy density, no memory effect and long cycle life, rechargeable Li-ion batteries (LIBs) have been extensively used as power sources for many electronic devices [1][2][3][4]. More recently, all-solid-state microbatteries have attracted intense attention for powering miniaturized electronics such as wireless sensors and a wide range of applications for the Internet of Things (IoT) [5][6][7][8].…”