Sputtering of silicon by multiply charged ions

Zwart, S.T. de; Fried, T.; Boerma, D.O.; Hoekstra, Ronnie; Drentje, A.G.; Boers, A.L.

doi:10.1016/0167-2584(86)90940-0

Cited by 4 publications

(2 citation statements)

References 16 publications

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“…(1986) it was claimed that, for bombardment of Si with singly charged ions, sputter yields are larger by more than a factor of two than for neutral projectiles of equal mass and energy. However, for 20 keV Ar q+ (q 9) impact on an Si surface, only the secondary-ion yield increased noticeably with q, whereas the respective total sputter yields (dominated by ejection of neutral Si atoms) did not change with q (de Zwart et al . 1986).…”

Section: History Of Potential Sputteringmentioning

confidence: 99%

Potential sputtering

Aumayr

Winter

2003

Philosophical Transactions of the Royal Society of London. Seri

150

107

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The potential energy stored in multiply charged ions is liberated when the ions recombine during impact on a solid surface. For certain target species this can lead to a novel form of ion-induced sputtering, which, in analogy to the usual kinetic sputtering, has been termed 'potential sputtering'. This sputtering process is characterized by a strong dependence of the observed sputtering yields on the charge state of the impinging ion and can take place at ion-impact energies well below the kinetic sputtering threshold. We summarize a series of recent careful experiments in which potential sputtering has been investigated for hyperthermal highly charged ions' impact on various surfaces (e.g. Au, LiF, NaCl, SiO(2), Al(2)O(3) and MgO), present the different models proposed to explain the potential sputtering phenomenon and also discuss possible applications of potential sputtering for nanostructure fabrication.

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Section: History Of Potential Sputteringmentioning

confidence: 99%

Potential sputtering

Aumayr

Winter

2003

Philosophical Transactions of the Royal Society of London. Seri

150

107

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“…While factors like kinematics, energy deposition, material response, and the emission of secondary particles have already been studied extensively [12][13][14][15][16][17][18][19] , the charge state of the ion has been mostly disregarded. For ions with moderate energies, Niels Bohr considered counteracting electron capture and loss processes upon entering a sample and deduced a relation for an equilibrium charge state q eq the projectile accommodates 20 .…”

mentioning

confidence: 99%

Peeling graphite layer by layer reveals the charge exchange dynamics of ions inside a solid

et al. 2021

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Over seventy years ago, Niels Bohr described how the charge state of an atomic ion moving through a solid changes dynamically as a result of electron capture and loss processes, eventually resulting in an equilibrium charge state. Although obvious, this process has so far eluded direct experimental observation. By peeling a solid, such as graphite, layer by layer, and studying the transmission of highly charged ions through single-, bi- and trilayer graphene, we can now observe dynamical changes in ion charge states with monolayer precision. In addition we present a first-principles approach based on the virtual photon model for interparticle energy transfer to corroborate our findings. Our model that uses a Gaussian shaped dynamic polarisability rather than a spatial delta function is a major step in providing a self-consistent description for interparticle de-excitation processes at the limit of small separations.

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