Design-Process-Technology Co-Optimization for Manufacturability XIII 2019
DOI: 10.1117/12.2514569
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Standard-cell design architecture options below 5nm node: The ultimate scaling of FinFET and Nanosheet

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Cited by 13 publications
(7 citation statements)
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“…We set the number of masks for each BEOL according to [7]. We use 36nm and 24nm for the contacted poly pitches (CPPs)/M1 pitch and M0/M2 metal pitches, respectively, by applying the design parameters from [2] 5 .…”
Section: Resultsmentioning
confidence: 99%
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“…We set the number of masks for each BEOL according to [7]. We use 36nm and 24nm for the contacted poly pitches (CPPs)/M1 pitch and M0/M2 metal pitches, respectively, by applying the design parameters from [2] 5 .…”
Section: Resultsmentioning
confidence: 99%
“…Fig. 7 shows that the cell width increases by 75% with the EOL=1 for 1-tier AND2x2 VFET cell 7 . Therefore, VFET requires EOL=0 to achieve the maximum area reduction over the conventional structure.…”
Section: Single Cell Comparisonsmentioning
confidence: 99%
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“…Technology scaling has driven the phenomenal success of the semiconductor industry in delivering more complex, faster, and cheaper integrated circuits with a high quality of service [1]. Silicon technology has entered the nano-era and transistors with sizes below 5 nm are being prototyped [2,3]. However, it is widely recognized that defects and variability in device characteristics during the fabrication process, and their impact on the overall quality and reliability of the system represent major challenges, especially when considering high-quality levels, e.g., in the range of defective parts per billion (DPPB) [4].…”
Section: Introductionmentioning
confidence: 99%