2020
DOI: 10.2478/msp-2019-0083
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Stereometric analysis of Ta2O5 thin films

Abstract: The purpose of this work is the study of the correlation between the thickness of tantalum pentoxide thin films and their three-dimensional (3D) micromorphology. The samples were prepared on silicon substrates by electron beam evaporation. The differences in surface structure of the processed and reference samples were investigated. Compositional studies were performed by energy-dispersive X-ray spectroscopy. Stereometric analysis was carried out on the basis of atomic force microscopy (AFM) data, for tantalum… Show more

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Cited by 6 publications
(6 citation statements)
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“…In view of this, the use of AFM image processing to obtain stereometric parameters of surfaces has been widely studied in recent years (Stach et al, 2019;Sobola et al, 2020;Zaneta et al, 2017;Ţ alu et al, 2015). These measurements provide mechanisms for a better understanding of relevant aspects of a surface, like for example, roughness, peak distribution, hill regions, pit regions, and power spectrum density (PSD), among others.…”
Section: Morphology Analysismentioning
confidence: 99%
“…In view of this, the use of AFM image processing to obtain stereometric parameters of surfaces has been widely studied in recent years (Stach et al, 2019;Sobola et al, 2020;Zaneta et al, 2017;Ţ alu et al, 2015). These measurements provide mechanisms for a better understanding of relevant aspects of a surface, like for example, roughness, peak distribution, hill regions, pit regions, and power spectrum density (PSD), among others.…”
Section: Morphology Analysismentioning
confidence: 99%
“…Stereometric analysis was performed based on the AFM data because it provides true three-dimensional information about the surface texture. , Topography of the surface based on stereometric analysis was described using the SPIP-TM version 6.7.4 software, based on ISO 25178–2:2012 and ASME B46.1–2009 . The histograms of the height distribution of the AFM images (painted in blue) with their integration curves (painted in red) associated with the images are shown in Figure .…”
Section: Resultsmentioning
confidence: 99%
“…In the case of the ALD method, a chemical reaction occurs on the surface and only during heat treatment crystallites are formed on the surface. It was noted that thin Ta2O5 films were formed by the fractal mechanism [33]. This work also studied the correlation between the thickness of Ta2O5 thin films and their 3D micromorphology.…”
Section: Atomic Force Microscopy Datamentioning
confidence: 92%