2017
DOI: 10.1016/j.tsf.2017.01.008
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Stoichiometric p-type Cu 2 O thin films prepared by reactive sputtering with facing target

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Cited by 19 publications
(2 citation statements)
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“…Since this initial report, numerous studies have reported the development of high-performance p-channel Cu 2 O TFTs fabricated at low temperatures with diverse deposition methods. [28][29][30][31][32][33][34][35][36][37] In the initial stage, processing optimization was mostly achieved by controlling the thickness and fabrication conditions, such as O 2 plasma density.…”
Section: Progress Of P-channel Oxide Thin-film Transistorsmentioning
confidence: 99%
“…Since this initial report, numerous studies have reported the development of high-performance p-channel Cu 2 O TFTs fabricated at low temperatures with diverse deposition methods. [28][29][30][31][32][33][34][35][36][37] In the initial stage, processing optimization was mostly achieved by controlling the thickness and fabrication conditions, such as O 2 plasma density.…”
Section: Progress Of P-channel Oxide Thin-film Transistorsmentioning
confidence: 99%
“…But doping by copper ions which are of +1 valence promotes p-type. Indeed, Ahn et al [65] reported that Cu 2 O is a p type semiconductor. This makes that free charge carrier density can be classified as follows:…”
Section: Opto-thermal Investigationmentioning
confidence: 99%