2007
DOI: 10.1016/j.jcrysgro.2006.11.089
|View full text |Cite
|
Sign up to set email alerts
|

Strain compensation for InGaAs–AlAs–AlAsSb coupled double quantum wells by controlling the barrier layer composition

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Year Published

2007
2007
2018
2018

Publication Types

Select...
4
1

Relationship

2
3

Authors

Journals

citations
Cited by 5 publications
(2 citation statements)
references
References 5 publications
0
2
0
Order By: Relevance
“…AlAs layers with a thickness of 1 ML were inserted between the Si-doped InGaAs quantum wells and the AlAsSb barriers because they suppress the exchange reactions between the As and Sb atoms at the InGaAs-to-AlAsSb interface. The tensile strain produced by the insertion of AlAs layers was compensated by increasing the Sb content of the AlAsSb barriers [6]. After the growth of the epitaxial layer, mesa waveguide structures with a height of 2-µm mesa were fabricated by dry-etching.…”
Section: Fabrication and Characterizationmentioning
confidence: 99%
“…AlAs layers with a thickness of 1 ML were inserted between the Si-doped InGaAs quantum wells and the AlAsSb barriers because they suppress the exchange reactions between the As and Sb atoms at the InGaAs-to-AlAsSb interface. The tensile strain produced by the insertion of AlAs layers was compensated by increasing the Sb content of the AlAsSb barriers [6]. After the growth of the epitaxial layer, mesa waveguide structures with a height of 2-µm mesa were fabricated by dry-etching.…”
Section: Fabrication and Characterizationmentioning
confidence: 99%
“…In a heterostructure, the quality of heterointerface is very important for obtaining good crystalline and optical properties. [16][17][18][19] Due to the high vapor pressure and diffusibility of group V atoms, a highquality interface is difficult to obtain between different group V layers. Thus, a change in the designe of the layer order of the CDQW structure is required, i.e., minimization of the change in constituent atoms at the heterointerface.…”
Section: Cdqw Designmentioning
confidence: 99%