2021
DOI: 10.1088/1361-6439/abe20b
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Strain engineering of graphene nano-resonator

Abstract: Nano-resonators are increasingly used to study fundamental phenomena in dynamical systems. Strain tuning of resonance frequency provides an additional control knob in experiments that use these devices. In this work, we present a simple technique to tune the strain in these nano-resonators by controllably deforming a small section of the silicon substrate. We fabricate the graphene nano-resonators on a thinned circular region on the Si/SiO2 substrate. This circular diaphragm can be easily deformed by creating … Show more

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Cited by 6 publications
(10 citation statements)
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“…171,219,227,228,229,230,231 The amount of splitting (denoted as 2𝑔) increases with Λ , and can be controlled by modulating the strength of the pump signal (Figure 10.4d,e), 227,229,231 tuning the tension using a DC gate bias, 227,231 heating the resonator using a laser beam, 171,228 or even bending the substrate. 245 Transfer of energy between the modes can also occur 241 when ωp = | ω1 -ω2 | / n, for integer values of 𝑛 ≥ 2. 171,227,228,229,230,231 An example of this phenomenon in 2D NEMS resonators is shown in Figure 10.4f.…”
Section: Coupling Through Nonlinearitymentioning
confidence: 99%
See 1 more Smart Citation
“…171,219,227,228,229,230,231 The amount of splitting (denoted as 2𝑔) increases with Λ , and can be controlled by modulating the strength of the pump signal (Figure 10.4d,e), 227,229,231 tuning the tension using a DC gate bias, 227,231 heating the resonator using a laser beam, 171,228 or even bending the substrate. 245 Transfer of energy between the modes can also occur 241 when ωp = | ω1 -ω2 | / n, for integer values of 𝑛 ≥ 2. 171,227,228,229,230,231 An example of this phenomenon in 2D NEMS resonators is shown in Figure 10.4f.…”
Section: Coupling Through Nonlinearitymentioning
confidence: 99%
“…When the rate of transfer of phonons between the modes (∝ Λ) is larger than the rate of decay of phonons in each mode (∝ γ 1 + γ 2 ), the system is said to be in the strong coupling regime, where each of the two resonances splits . Such splitting is observed in many 1D and 2D NEMS resonators (Figure b,c). ,, The amount of splitting (denoted as 2 g ) increases with Λ and can be controlled by modulating the strength of the pump signal (Figure d,e), ,, tuning the tension using a DC gate bias, , heating the resonator using a laser beam, or even bending the substrate …”
Section: Mechanical Mode Coupling In Low-dimensional Resonatorsmentioning
confidence: 99%
“…[ 20 ] Outstanding responsivities have been shown with respect to charges, voltage, [ 11,21 ] temperature, [ 22,23 ] mass, [ 22 ] and strain. [ 24 ]…”
Section: Introductionmentioning
confidence: 99%
“…[20] Outstanding responsivities have been shown with respect to charges, voltage, [11,21] temperature, [22,23] mass, [22] and strain. [24] Graphene resonators have been suggested for use as accelerometers in purely theoretical works, [25][26][27][28][29] but no resonant graphene accelerometer has been experimentally demonstrated to date. The main reason is the low mass of graphene devices, Measuring vibrations is essential to ensuring building structural safety and machine stability.…”
Section: Introductionmentioning
confidence: 99%
“…Tuning strain in a graphene resonator has been done in previous works. In most works, the tuning is achieved by changing the electrostatic force imposed vertically to the graphene plane . This method is easy to implement but has limited range of tuning due to the “pull-in” behavior .…”
Section: Introductionmentioning
confidence: 99%