Strain sensitivity and temperature behavior of invar alloy films

Rajanna, K.; Nayak, M.M.

doi:10.1016/s0921-5107(00)00503-1

Cited by 19 publications

(17 citation statements)

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“…7, а, б, мають місце в плівкових стопах (рис. 8) [32][33][34] та напівпровіднико-вих плівках [35]. Результати, аналогічні [32,34], одержані також і нами на прикладі плівкових стопів Ni-Co [36].…”

Section: експериментальні результатиunclassified

Effect of the Tensosensitivity in Metal Film Materials

et al. 2007

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В огляді здійснено аналізу відомих літературних даних про явище тензое-фекту в тонких і товстих плівках металів, стопів або композиційних мате-ріялів з металевою основою. Розглянуто відомі напівклясичні та феноме-нологічні моделі для одно-і багатошарових плівкових систем, наведено ре-зультати їх апробації і вказано ступінь відповідности розрахункових і екс-периментальних результатів. Зроблено висновок про значну роль так нази-ваних деформаційних ефектів, врахування яких дає хороше узгодження з експериментальними даними. Проаналізовано найменш вивчене питання фізики тонких плівок про температурну залежність коефіцієнтів поздовж-ньої та поперечної тензочутливости. Наведено численні експериментальні результати, які підтверджують теоретичні висновки. Проаналізовано ріж-ні аспекти практичного застосування плівкових матеріялів як чутливих елементів тензодавачів.The analysis of literature results concerning tensoresistive effect in thin and thick films of metals, alloys or composite materials based on a metal is presented. Well-known semi-classical and phenomenological models for one-and multilayered film systems are considered, results of their testing are presented, and the degree of conformity of calculated results with experimental ones is specified. A conclusion is drawn concerning significant role of deformation effects, which are taken into account to give satisfactory conformity with experimental data. A least studied problem in physics of thin films concerning the temperature dependence of coefficients of longitudinal and transverse tensosensitivity is analysed. Numerous experimental results, which confirm theoretical conclusions, are presented. Different aspects of practical application of film materials as sensitive elements of strain sensors are analysed.В обзоре проведен анализ известных литературных данных по тензоэффек-ту в тонких и толстых пленках металлов, сплавов или композиционных материалов с металлической основой. Рассмотрены известные полукласси-ческие и феноменологические модели для одно-и многослойных пленоч-ных систем, приведены результаты их апробации и указана степень соот-

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Section: експериментальні результатиunclassified

Effect of the Tensosensitivity in Metal Film Materials

et al. 2007

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“…Fe-Ni alloy with Ni concentration of around 36% also known as invar36 alloy exhibits low coefficient of thermal expansion (CTE) and high dimensional stability near room temperature [1]. Due to their low CTE and soft magnetic properties, these alloys are used in many industrial applications [2].Typical examples of applications include: thermostatic bimetals, glass sealing, integrated circuit packaging, cathode ray tube shadow masks, composite molds/tooling and membranes for liquid natural gas tankers [3].In addition to general applications, in recent year's invar36 alloy in thin film form is gaining importance in sensors as well as in micro electro mechanical system applications [3,4,5]. Thin film technology plays an important role in the mass fabrication of thin film strain gauges with considerable cost reduction [6,7].Sputtering is one of the vacuum deposition techniques used to prepare thin film strain gauges.…”

Section: Introductionmentioning

confidence: 99%

“…Glass slides are degreased with vapors of isopropyl alcohol. At each stage glass slides are washed with deionised water and finally they are dried by blowing nitrogen gas [5]. Invar36 thin films are deposited on glass slides by DC magnetron sputtering technique at room temperature.…”

Section: Introductionmentioning

confidence: 99%

“…The TCR of film is calculated using equation (1) Where △R corresponds to a small change in sheet resistance and △T is small change in temperature. A four point bending setup is designed and fabricated in order to study the resistance-strain behavior of films and hence to measure the gauge factor of the films [5]. Four point bending setup is calibrated at room temperature with overall accuracy of 0.21% by using metal foil strain gauges of known gauge factor values (2.1).…”

Section: Introductionmentioning

confidence: 99%

“…δ is the deflection in µm at the center of the substrate measured by Mitutoyo dial indicator-21095-10 with 1µ resolution.Simultaneously the relative change in resistance (△R/R) is measured using calibrated 6 1 2 digit Hewlett Packard (model HP34401A) digital multimeter. The value of gauge factor is calculated using equation 3 [5].…”

Section: Introductionmentioning

confidence: 99%

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Influence of annealing and thickness on the electrical properties of invar36 thin film for strain gauge applications

Kalpana¹,

Prasad²,

Nayak³

2013

Int. J. Thin Film Sci. Tec.

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Invar36 thin films with various thicknesses from 200Åto 1400Åare deposited on glass substrates by DC magnetron sputtering technique. After deposition, the samples are annealed in vacuum ambient (10 −5 mbar) upto 500 • C. Electrical properties of as-deposited as well as annealed films are analyzed with respect to thickness and annealing temperature. In situ measurement of sheet resistance of films with respect to annealing temperature is carried out by four probe technique. There is a decrease of sheet resistance and resistivity of all films with increasing temperature irrespective of film thickness.The resistivity of the as deposited films is around 230 µΩ-cm and decreases with increasing temperature and found as 84 µΩ-cm for 550Åfilm annealed at 500 • C. Temperature coefficient of resistance (TCR) of films at different temperature is measured and is found to be in the range of 10 −4 / • C.Gauge factors of as deposited and annealed at 300 • C and 500 • C films are measured by using four point bending technique and it is found that gauge factor decreases with respect to annealing temperature irrespective of film thickness. The best characteristics among different thickness and annealing temperature are obtained at 500 • C, for the films of thicknesses between 400Åto 600Å.

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