Stress investigations in 3D-integrated silicon microstructures

Abstract

With the anticipated slow-down of Moore's Law in the near future, three-dimensional (3D) packaging of microelectronic structures would enable to further increase the integration density required to meet the forecasted demands of future exa-scale computing, cloud computing, big data systems, cognitive computing, mobile communicatoin and other emerging technologies. Through-silicon vias (TSVs) are a pathway to provide electrical connections for signaling and power-delivery through 3D-stacked silicon (Si) microstructures. TSVs and related structures such as, e.g., interconnects and redistribution lines, however, induce stress in their proximity, namely upon electrochemical deposition and subsequent annealing, the latter due to the large mismatch in the coefficient of thermal expansion between Si and the TSV-filling materials used