2006
DOI: 10.1088/1742-6596/29/1/029
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Stress reduction behavior in metal-incorporated amorphous carbon films: first-principles approach

Abstract: Stress reduction behavior in metal-incorporated amorphous carbon films: first-principles approach Abstract. The stress reduction behavior in metal-incorporated amorphous carbon films was investigated by the first-principle calculation. We calculated the total energy of the system with changes in bond angles between the incorporated metal (Ti, Mo, Cr, W, Ag, Au, Al, Si, etc) and the carbon atoms by using DMOL 3 computational software package. The four carbon atoms are arranged as a tetrahedron, with a carbon or… Show more

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Cited by 14 publications
(3 citation statements)
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“…Similar evolutions of internal stresses of the DLC coatings, as a function of the metal content, were also obtained by Dai and Wang for Al-DLC coatings [40], and by C. Corbella for Me-doped DLCs (W, Mo, Nb, and Ti) [45]. According to their model, Choi et al [63] suggest that the stress reduction in Me-DLC coatings is possible without significant deterioration of mechanical properties due to the pivotal role of the metal atoms; a distortion of the angle of the atomic bond may occur without a significant increase in elastic energy, which may be considered as resulting from weak and less directional Me-C bonds.…”
Section: Residual Stresssupporting
confidence: 74%
“…Similar evolutions of internal stresses of the DLC coatings, as a function of the metal content, were also obtained by Dai and Wang for Al-DLC coatings [40], and by C. Corbella for Me-doped DLCs (W, Mo, Nb, and Ti) [45]. According to their model, Choi et al [63] suggest that the stress reduction in Me-DLC coatings is possible without significant deterioration of mechanical properties due to the pivotal role of the metal atoms; a distortion of the angle of the atomic bond may occur without a significant increase in elastic energy, which may be considered as resulting from weak and less directional Me-C bonds.…”
Section: Residual Stresssupporting
confidence: 74%
“…Therefore, the films possess a relatively lower internal stress when the set value increases up to 5%, which may improve the adhesion strength. Moreover, Choi et al pointed out that metal doping reduced the directionality of bond, which led to a decrease in internal stress caused by bond angle distortion in the amorphous carbon network [38]. However, plenty of carbide phases will be generated with further increases of the set value.…”
Section: Effect Of Set Values On Mechanical Propertiesmentioning
confidence: 99%
“…[45,47] Besides ATTENTION: The Singapore Copyright Act applies to the use of this document. Nanyang Technological University Library hydrogenated a-C (a-C:H), various groups have also studied the structure of a-C with other impurities such as metals [91], nitrogen [92], fluorine [93] To complicate matters, a-C is also generally not uniform in its macrostructure. The irregularities could be intentionally build into the material through the manipulation of the ion energy during deposition or unintentionally create by deposition conditions.…”
Section: Micro and Macro-structure Of Amorphous Carbonmentioning
confidence: 99%