Structural and morphological studies of electrodeposited amorphous silicon thin films

Sarma, P.R.L.; Mohan, T.R. Rama; Venkatachalam, S.; Singh, Jagmal; Sundersingh, V.P.

doi:10.1016/0921-5107(92)90064-g

Materials Science and Engineering: B

1992

DOI: 10.1016/0921-5107(92)90064-g

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Structural and morphological studies of electrodeposited amorphous silicon thin films

P.R.L. Sarma

T.R. Rama Mohan

S. Venkatachalam

et al.

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Cited by 7 publications

(1 citation statement)

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“…Anodic oxidation in saturated H 2 SiF 6 is also an alternative to LPD in such solar cells. 16 Another possible application is in amorphous silicon thin-film deposition by an electrodeposition method 17 that results in high-resistivity Si films. Hydrofluorosilicic acid also has industrial applications such as caps etchant and phosphoric acid purification.…”

mentioning

confidence: 99%

Anomalous Anisotropic Etching of (111) and (100) Silicon Wafers Using Acidic Solutions

Famini

Esfandyarpour

Mohajerzadeh

2006

J. Electrochem. Soc.

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We report anisotropic chemical wet etching of ͑111͒ and ͑100͒ silicon wafers using an acidic solution. The etching is performed using a solution consisting of hexafluorosilicic acid ͑H 2 SiF 6 ͒ and nitric acid. For silicon samples with ͗111͘ orientation, the etching results in the formation of crystallographic features with hexagonal openings. The walls of the crater are assumed to be different ͗111͘ planes with their crossing with ͗211͘ planes. Extended periods of etching result in the formation of scale-repeated features resembling the fractal structures. Etching of a ͗100͘ silicon was also been examined, which indicated the evolution of concave corners and ͗111͘ and ͗331͘ planes.

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mentioning

confidence: 99%

Anomalous Anisotropic Etching of (111) and (100) Silicon Wafers Using Acidic Solutions

Famini

Esfandyarpour

Mohajerzadeh

2006

J. Electrochem. Soc.

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Cathodic Deposition of Silicon from Phenyltrichlorosilane in an Organic Solvent

Abbar¹,

Kareem

2013

International Journal of Electrochemical Science

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Ram¹,

Singh²,

Ramamohan

et al. 1997

Journal of Materials Science

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Structural and morphological studies of electrodeposited amorphous silicon thin films

Cited by 7 publications

References 21 publications

Anomalous Anisotropic Etching of (111) and (100) Silicon Wafers Using Acidic Solutions

Anomalous Anisotropic Etching of (111) and (100) Silicon Wafers Using Acidic Solutions

Cathodic Deposition of Silicon from Phenyltrichlorosilane in an Organic Solvent

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