Structural characteristics, magnetic nonuniformity, and magnetic intercrystalline interaction in high-coercivity Co-W and Co-P coatings

Shadrov, V. G.; Boltushkin, A. V.; Nemtsevich, L. V.

doi:10.1134/s0036029506030153

Cited by 10 publications

(7 citation statements)

References 4 publications

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“…The shifting diffraction peak reflects the increase in the phosphorous concentration of the Co(P) film because more phosphorous in the interstitial sites of the Co lattice can cause an enlarged lattice with a higher lattice strain. The obtained HCP Co structure concurs closely with previous studies 42,43 despite the increasing phosphorous content that can change the preferred orientation of the HCP structure 25 and further leads to an amorphous structure when the Co(P) film has a phosphorous concentration higher than 15.39 at.%. 29 However, in our investigation, the structural orientation remains unchanged probably due to the low concentration of phosphorous.…”

Section: Resultssupporting

confidence: 90%

Synthesis of Dilute Phosphorous-Embedded Co Alloy Films on a NiSi Substrate with a Superior Gap-Filling Capability for Nanoscale Interconnects

Fang

Cheng

et al. 2021

J. Electrochem. Soc.

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Nanoscale cobalt interconnection wire has a lower mean free path of electrons to reduce the electrical resistivity, therefore it has been increasingly studied as a promising interconnect material to replace the conventionally used copper in state-of-the-art nanoscale devices. This process further limits the space for barrier/seed layer deposition to conformally fill the narrow trenches/contact holes in nanoscale devices. Thus, an electrochemical approach not involving a conventional high-resistivity barrier is presented to study the gap-filling capability and properties of Co(P) films with a controlled composition on a NiSi substrate. Examining electrodeposited Co(P) films reveals that the composition is determined mainly by the deposition potential instead of the amount of NaH2PO2 in the electrolytes, yielding a film with a phosphorous concentration lower than 2.62 at.%. The lightly doped Co(P) film has an hexagonal close-packed Co structure with phosphorous atoms at the interstitial lattice site. A chronoamperometry study on the current transient during the electrochemical deposition indicates that NaH2PO2 addition can enhance the deposition of the Co(P) films. Hence, the Co(P) film developed here is capable of gap filling nanoscale trenches up to an aspect ratio of 5 and is practical as a contact plug material for NiSi in nanoscale devices.

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Section: Resultssupporting

confidence: 90%

Synthesis of Dilute Phosphorous-Embedded Co Alloy Films on a NiSi Substrate with a Superior Gap-Filling Capability for Nanoscale Interconnects

Fang

Cheng

et al. 2021

J. Electrochem. Soc.

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“…This might be attributed to more intense secondary reaction (i.e., HER) and higher electrical resistance of the deposit at higher P content. Using the same P precursor at pH 4.85, Shadrov et al also observed the higher P content with increase in NaH 2 PO 2 concentration in the range of 2-5 at% P. 16 Moreover, this is consistent with the Co-P co-deposition at higher temperature (60 °C-80 °C), lower pH (0.5-1.6) and H 3 PO 3 as the P source. 2,3,10 The XRD spectra in Fig.…”

Section: Effects Ofmentioning

confidence: 57%

“…Since the electrodeposition of Co-P film was first introduced by Brenner in 1950, many efforts to control the P content and microstructures of the electrodeposited Co-P have been reported. [2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17] However, a small fraction of them discussed the magnetic properties of the deposited Co-P films without systematic studies. 5,12,13,16,17 Majority of them reported the formation of amorphous Co-P film whose magnetic properties were barely determined by the P content and microstructures.…”

mentioning

confidence: 99%

“…[2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17] However, a small fraction of them discussed the magnetic properties of the deposited Co-P films without systematic studies. 5,12,13,16,17 Majority of them reported the formation of amorphous Co-P film whose magnetic properties were barely determined by the P content and microstructures. In this work, effects of various synthesis parameters (i.e.…”

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confidence: 99%

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Hard Magnetic Properties of Nanocrystalline Cobalt-Phosphorus (Co_100-XP_X) Electrodeposits

Park

Yoo

et al. 2021

J. Electrochem. Soc.

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Nanocrystalline cobalt-phosphorus (Co100-xPx) thin films were electrodeposited and their extrinsic magnetic properties were systematically studied by controlling various synthesis parameters. The crystalline thin films exhibited the perpendicular anisotropy which had the behavior of stripe domains. The incorporation of phosphorus (P) atoms into cobalt (Co) lattice structure resulted in the transition from single to pseudo-domain particles. As P content augmented in the crystalline deposits, P precipitation at the grain boundary served as pinning sites, resulting in higher coercivity. Further increase in P content reduced the crystallinity of the deposits and thereby lowered perpendicular anisotropy and coercivity. Promotion of P content was observed at higher NaH2PO2 concentration, lower pH, and smaller film thickness. Temperature was also adjusted to tune P content by controlling the fraction of free Co2+ ions and complexes Co(NH3)x 2+ in solution.

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“…Owing to the addition of P, the lattice d spacing has increased. Shadrov et al 33 showed that the HCP phase crystallites have (001) preferred orientation with 10 nm grain size in different amounts of %P, whereas Co-P-CNT alloys produced by pulse electrodeposition consisted of 5-10 nm grain size as reported by Kosta et al 34 Fukunaka et al reported a change in preferred orientation of HCP structure from (100) to (002) with increasing % P content. 35 In this study, there is no change in HCP structure with varying % P content.…”

Section: Microhardness Measurementsmentioning

confidence: 86%

Preparation and characterisation of nanocrystalline cobalt–phosphorus coatings reinforced with carbon nanotubes

Anand

Natarajan

2014

Surface Engineering

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Nanocrystalline cobalt-phosphorus-carbon nanotube (CNT) composite coatings on stainless steel substrates with various contents of phosphorus were prepared by a pulse electrodeposition technique involving cobalt plating bath dispersed with CNTs. Microhardness, potentiodynamic polarisation and scanning electron microscopy (SEM) studies were used to characterise Co-P and Co-P-CNT composite coatings. The microhardness of Co-P-CNT coatings is found higher than that of Co-P coating. With the increase in phosphorus content, the microhardness values for the heat treated coatings increased almost twice when compared to that of the as deposited coatings. The effects of various contents of phosphorus and CNTs on the corrosion resistance were investigated, and it was found that nanocrystalline Co-P composite coatings exhibit better corrosion resistance than Co-P-CNT coatings.

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Structural characteristics, magnetic nonuniformity, and magnetic intercrystalline interaction in high-coercivity Co-W and Co-P coatings

Cited by 10 publications

References 4 publications

Synthesis of Dilute Phosphorous-Embedded Co Alloy Films on a NiSi Substrate with a Superior Gap-Filling Capability for Nanoscale Interconnects

Synthesis of Dilute Phosphorous-Embedded Co Alloy Films on a NiSi Substrate with a Superior Gap-Filling Capability for Nanoscale Interconnects

Hard Magnetic Properties of Nanocrystalline Cobalt-Phosphorus (Co_100-XP_X) Electrodeposits

Preparation and characterisation of nanocrystalline cobalt–phosphorus coatings reinforced with carbon nanotubes

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Structural characteristics, magnetic nonuniformity, and magnetic intercrystalline interaction in high-coercivity Co-W and Co-P coatings

Cited by 10 publications

References 4 publications

Synthesis of Dilute Phosphorous-Embedded Co Alloy Films on a NiSi Substrate with a Superior Gap-Filling Capability for Nanoscale Interconnects

Synthesis of Dilute Phosphorous-Embedded Co Alloy Films on a NiSi Substrate with a Superior Gap-Filling Capability for Nanoscale Interconnects

Hard Magnetic Properties of Nanocrystalline Cobalt-Phosphorus (Co100-XPX) Electrodeposits

Preparation and characterisation of nanocrystalline cobalt–phosphorus coatings reinforced with carbon nanotubes

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Product

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Hard Magnetic Properties of Nanocrystalline Cobalt-Phosphorus (Co_100-XP_X) Electrodeposits