2006
DOI: 10.1016/j.optmat.2004.11.057
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Structural characterization of CVD diamond films using Raman and ESR spectroscopy methods

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Cited by 40 publications
(20 citation statements)
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“…The most popular methods are: microwave plasma CVD (MP CVD), hot filament CVD (HF CVD), radio frequency CVD (RF CVD), laser induced plasma (LIP) and flame methods [1].…”
Section: Introductionmentioning
confidence: 99%
“…The most popular methods are: microwave plasma CVD (MP CVD), hot filament CVD (HF CVD), radio frequency CVD (RF CVD), laser induced plasma (LIP) and flame methods [1].…”
Section: Introductionmentioning
confidence: 99%
“…highest hardness, highest known value of thermal conductivity at 300 K, wide band gap (∼5.5 eV), and broad optical transparency from deep ultraviolet to far infrared), polycrystalline diamond films have attracted increasing attention [1][2][3][4][5]. Since the properties of a diamond crystal depend on the crystallographic direction, it is important to understand the effect of film deposition parameters on the evolution of the crystallographic orientation distribution (texture) and microstructure [6][7][8][9][10][11][12][13][14][15]. For instance, in the field of mechanical properties and wear, it was observed that [100]-oriented films exhibit lower roughness and higher wear resistance than those in other crystallographic directions, which renders them suited for tribological applications [13] 1 .…”
Section: Introductionmentioning
confidence: 99%
“…2 and Table II). The presented Raman spectra of the diamond layers consist of sharp, narrow diamond peak at around 1332 cm −1 and broad G-band peaked at 1530-1560 cm −1 [6]. The Raman peaks (diamond and G-band) are superimposed on a broad luminescence background inclined at different angles.…”
Section: Methodsmentioning
confidence: 90%