Structural development in the early stages of annealing of sol–gel prepared lead zirconate titanate thin films

Abstract

Lead zirconate titanate (PZT) thin films on platinized silicon were fabricated and their structural development upon annealing was characterized by x-ray diffraction and transmission electron microscopy (TEM). The amount of a transient intermetallic phase Pt3Pb was found initially to increase with annealing time and to decay after reaching a maximum. The kinetic process of growth and decay was simulated by using the Avrami equation. The Avrami coefficient n and growth rate constant k were determined by comparing the experimental results and the simulated curves, from which activation energies of 40 and 145 kJ/mol were obtained for the growth and decay of the intermetallic Pt3Pb phase, respectively. The perovskite PZT was found by using TEM to nucleate epitaxially on top of the Pt3Pb phase. Evidence is presented that the Pt3Pb phase plays a major role in determining the crystallite’s orientation at the nucleation stage of the perovskite PZT. This depends strongly on the annealing temperature and the orientation changes little during the following growth process.

Epitaxial 0.65PbMg1/3Nb2/3O3–0.35PbTiO3 (PMN–PT) thin films grown on LaNiO3/CeO2/YSZ buffered Si substrates

“…A mixture of the perovskite and the pyrochlore phase was observed at substrate temperatures above 650 • C. The peak intensity exhibiting the pyrochlore phase increased as the substrate temperature increased from 650 to 700 • C. Simultaneously, the films grown at a high deposition temperature showed deficient Pb and Mg concentrations because they were easily evaporated, and then the pyrochlore phase began forming with the perovskite phase [13]. However, at a low substrate temperature of 550 • C, the energy to crystallize the film into a complete perovskite phase was not sufficient, at which point the pyrochlore phase had already started to appear [14]. These results show that there is a narrow window of opportunity for the growth of PMN-PT thin films with a pure perovskite structure [15].…”

Homogeneity issues in chemical solution deposition of Pb(Zr,Ti)O3 thin films

“…[1][2][3][4][5] Various CSD methods are broadly divided into those involving a reaction leading to a heterometallic precursor, such as (organic) sol-gel, or polymeric precursor routes in water-based media or those based on mixing of non-reactive organic compounds, i.e. metalloorganic decomposition (MOD).…”

Microchannel Molding: A Soft Lithography-inspired Approach to Micrometer-scale Patterning

“…PZT sol-gel wets Pt with great affinity and forms a very strong bond with the electrode material during heat treatment due to the formation of a metastable Pt 3 Pb intermetallic phase at the interface. 35,36 As a result, the amount of curling at the edges of the patterned lines when using rectangular channels with Pt coated on the bottom is greatly reduced, and the PZT lines stay better pinned to the corners of the channel. However, the magnitude of the topographical defects at the edge is on the same order of magnitude as the thickness of the sintered line and still poses significant obstacles in a manufacturing process.…”