Structure and properties of ZrCoCe getter film with Pd protection layer

Cui, Jiandong; Wu, Huating; Zhang, Yan; Xu, Yaohua; Yang, Zhiliang

doi:10.1007/s12598-020-01522-1

Cited by 5 publications

(4 citation statements)

References 29 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…A rough surface and a continuous columnar structure may be beneficial for improving the sorption performance of the ZrCoCe getter films. The rough surface of the ZrCoCe getter film had more active sites, and the continuous columnar structure was more conducive to the diffusion of active gasses in the getter film [ 28 ]. Therefore, both the rough surface and the continuous columnar structure may have had positive effects on the sorption performance of the ZrCoCe getter films.…”

Section: Resultsmentioning

confidence: 99%

“…The sorption performance of the ZrCoCe getter film with the Ti barrier layer was approximately twice that of the ZrCoCe getter film without a barrier layer, and much greater than that of the ZrCoCe getter film with the ZrCoCe barrier layer. The data collected on the sorption performance of the ZrCoCe getter films with different barrier layers and the ZrCoCe getter films [ 28 ] are shown in Table 3 . Based on these results, the sorption performance of the ZrCoCe getter film with the Ti barrier layer was the most effective solution.…”

Section: Resultsmentioning

confidence: 99%

See 1 more Smart Citation

Influence of Barrier Layers on ZrCoCe Getter Film Performance

Shi

Xiong

Wu³

2023

Materials

View full text Add to dashboard Cite

Improving the vacuum degree inside the vacuum device is vital to the performance and lifespan of the vacuum device. The influence of the Ti and ZrCoCe barrier layers on the performance of ZrCoCe getter films, including sorption performance, anti-vibration performance, and binding force between the ZrCoCe getter film and the Ge substrate were investigated. In this study, the Ti and ZrCoCe barrier layers were deposited between the ZrCoCe getter films and Ge substrates. The microtopographies of barrier layers and the ZrCoCe getter film were analyzed using scanning electron microscopes. The sorption performance was evaluated using the constant-pressure method. The surface roughness of the barrier layers and the getter films was analyzed via atomic force microscopy. The binding force was measured using a nanoscratch tester. The anti-vibration performance was examined using a vibration test bench. The characterization results revealed that the Ti barrier layer significantly improved the sorption performance of the ZrCoCe getter film. When the barrier material was changed from ZrCoCe to Ti, the initial sorption speed of the ZrCoCe getter film increased from 141 to 176 cm3·s−1·cm−2, and the sorption quantity increased from 223 to 289 Pa·cm3·cm−2 in 2 h. The binding force between the Ge substrate and the ZrCoCe getter film with the Ti barrier layer was 171 mN, whereas that with the ZrCoCe barrier layer was 154 mN. The results showed that the Ti barrier layer significantly enhanced the sorption performance and binding force between the ZrCoCe getter film and the Ge substrate, which improved the internal vacuum level and the stability of the microelectromechanical system vacuum devices.

show abstract

Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Influence of Barrier Layers on ZrCoCe Getter Film Performance

Shi

Xiong

Wu³

2023

Materials

View full text Add to dashboard Cite

show abstract

“…Beside Ti-Zr-V, surface coating of a ZrCo-type (Zr76.2Co20.7Ce3.1) thin film was also proposed by [86] using DC magnetron sputtering. The film thickness was 2.3 µm topped by 400 nm of palladium.…”

Section: Pd-coatingmentioning

confidence: 99%

Intermetallic alloys as hydrogen getters

Cuevas

Latroche

2022

Journal of Alloys and Compounds

View full text Add to dashboard Cite

“…In the analysis of metal element p or d spectra for the as-received TiZrV NEG surface layer, although Ti and Zr reached their highest oxide states, V 2 O 5 was not the dominant form of V. − Similar results have been observed for TiZrHfV and some ZrV NEG film passivation layers. However, different situations have also been discovered in the study of ZrV NEG films. , In O 1s for the surface layer of different types of NEGs, ,− ,− the signal of hydroxyl groups was observed apart from the strong peak of alloy oxides. The hydroxyl group was also reflected in the metal element p or d spectra, such as Zr 3d ,,, and Ni 2p .…”

Section: Introductionmentioning

confidence: 99%

Formation Mechanism of Passivation Layer under Air Exposure on TiZrV Non-Evaporable Getter Film

Shi,

Wang,

Shi

et al. 2024

J. Phys. Chem. C

View full text Add to dashboard Cite

Non-evaporable getter (NEG) films require thermal vacuum activation prior to their use in high vacuum environments. The degree of activation difficulty is influenced by the properties of the passivation layer, but there is limited information about its composition. The purpose of this study is to investigate the formation mechanism and clarify this issue. The film microstructure was investigated by scanning electron microscopy (SEM) and grazing incidence X-ray diffraction (GIXRD). The quantum chemical approach and a single-metal-atom catalytic model were used to calculate the energy barrier for the reactions between the metal atom and the gas molecule, as well as between different hydrocarbon groups. These results facilitated the deconvolution of the X-ray photoelectron spectroscopy (XPS) data and the variation analysis of the energy dispersive spectroscopy (EDS) results. It can be concluded that the presence or absence of hydrogen-proton catalysis can significantly affect the dissociation pathways of carbon dioxide, leading to the formation of different reaction products. In addition, the long-term aluminum foil wrapping and storage can significantly affect the composition of the film passivation layer. This study provides valuable insights not only into the passivation layer formation mechanism, but also into the film gettering mechanism.

show abstract

Structure and properties of ZrCoCe getter film with Pd protection layer

Cited by 5 publications

References 29 publications

Influence of Barrier Layers on ZrCoCe Getter Film Performance

Influence of Barrier Layers on ZrCoCe Getter Film Performance

Intermetallic alloys as hydrogen getters

Formation Mechanism of Passivation Layer under Air Exposure on TiZrV Non-Evaporable Getter Film

Contact Info

Product

Resources

About