1997
DOI: 10.1109/16.622597
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Study of the effects of a stepped doping profile in short-channel MOSFETs

Abstract: Abstract-The performance of a stepped doping profile for improving the short-channel behavior of a submicrometer MOS-FET has been analyzed in detail by using a quasi-two-dimensional (quasi-2-D) MOSFET simulator including inversion-layer quantization coupled with a one-electron Monte Carlo simulation. Several second-order effects, such as mobility degradation both by bulk-impurity and interface traps, carrier-velocity saturation, and channel-length modulation, have been included in the simulator. Very good agre… Show more

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Cited by 24 publications
(12 citation statements)
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“…convenient thickness next to the interface over a high-doping substrate, both the electron mobility and the threshold voltage of the device are improved while avoiding short channel effects [25].…”
Section: Stepped Doping Profilementioning
confidence: 99%
“…convenient thickness next to the interface over a high-doping substrate, both the electron mobility and the threshold voltage of the device are improved while avoiding short channel effects [25].…”
Section: Stepped Doping Profilementioning
confidence: 99%
“…(ii) The second key to the further improvement of CMOS technology is the enhancement of carrier mobility in the device channel [10]. In recent years, much research activity has been focused on this task, with the use of specific doping profiles, the growth of low-doped epitaxial layers on high doped substrates [14], and even the use of silicon-related materials instead of silicon. In relation to the latter proposal, a significant step was taken with the introduction of strained silicon to build the MOSFET channel [15].…”
Section: Introductionmentioning
confidence: 99%
“…We have also analyzed how this dependence is affected by trap position in the oxide and by the gate and drain-to-source voltages. In order to achieve this goal, we have used a quasi-two-dimensional short-channel MOSFET simulator including inversion-layer quantization and a one-electron Monte Carlo simulation allowing us to calculate the drain current 18 both in the case of an acceptor occupied trap ͑negatively charged͒ and in the case of an empty trap ͑neutral͒. Furthermore, this procedure provides relatively simple control of all the structure parameters.…”
Section: Introductionmentioning
confidence: 99%