Study of the influence of Ar on the formation of diamond-like bonds in films obtained from CH4+Ar, RF plasma deposition

Influence of Heat Treatment on Mechanical Properties of DLC Deposited by FIB-CVD

“…In many area of engineering applications, DLC have found as coatings for cutting tools, hard disks, metal molds and optical windows (1), (2) . Therefore, production of DLC has been investigated by a number of different methods such as vacuum evaporation (3) , laser ablation (4), (5) , magnetron sputtering (6) - (8) , chemical vapor deposition methods (9) - (11) . Recently, focused ion beam assisted CVD (FIB-CVD) method is developed as a new technique for producing of micro-and/or nano-DLC structures.…”

Influence of the gas atmosphere on the microstructure and mechanical properties of diamond-like carbon films by arc ion plating

“…Since Aisenberg and Chabot [4] first reported on DLC films by the ion beam deposition technique in the 1970s, the study of DLC films has been paid more attentions. It is now recognized that DLC films have been prepared by a variety of methods, such as pulsed laser deposition [5,6], magnetron sputtering [7], ion beam deposition [8], plasma enhanced chemical vapor deposition [9] and arc ion plating (AIP) [10,11]. Compared with the other deposition methods, the advantages of arc ion plating are high ionization ratio of atoms or clusters and high ion energy.…”