2004
DOI: 10.1016/j.matlet.2004.06.017
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Influence of the gas atmosphere on the microstructure and mechanical properties of diamond-like carbon films by arc ion plating

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Cited by 17 publications
(7 citation statements)
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“…DLC film comprises a mixture of sp 2 and sp 3 carbon bonds and is deposited by using high energy carbon species. DLC films are produced by a number of techniques like ion beam deposition, 7 radio frequency plasma enhanced chemical vapor deposition (r.f.-PECVD), 8 filtered cathodic vacuum arc (FCVA), 9 ion plating, 10 plasma immersion ion implantation and deposition (PIIID), 11 magnetron sputtering, 12 ion beam sputtering, 13 pulsed laser deposition, 14 and mass selected ion beam deposition. 15 The hydrogen content in DLC films varies up to 40%.…”
Section: Introductionmentioning
confidence: 99%
“…DLC film comprises a mixture of sp 2 and sp 3 carbon bonds and is deposited by using high energy carbon species. DLC films are produced by a number of techniques like ion beam deposition, 7 radio frequency plasma enhanced chemical vapor deposition (r.f.-PECVD), 8 filtered cathodic vacuum arc (FCVA), 9 ion plating, 10 plasma immersion ion implantation and deposition (PIIID), 11 magnetron sputtering, 12 ion beam sputtering, 13 pulsed laser deposition, 14 and mass selected ion beam deposition. 15 The hydrogen content in DLC films varies up to 40%.…”
Section: Introductionmentioning
confidence: 99%
“…A number of techniques based on physical vapor deposition (PVD) or chemical vapor deposition (CVD) have been developed for the He et al, 1994;Leu et al, 2004;Sánchez et al, 2000;Shim et al, 2000;Sui et al, 2006;Zou et al, 2004). Figure 13-1…”
Section: Deposition Methods and Fundamental Propertiesmentioning
confidence: 99%
“…All these merits render it a good biomaterial for application in orthopedic, cardiovascular, contact lenses, or dentistry. Many surface modification techniques have been applied to produce DLC films with a variety of carbonaceous precursor materials, including ion beam deposition [ 91 ], plasma-assisted chemical vapor deposition (PACVD) [ 92 ], filtered cathodic vacuum arc (FCVA) [ 93 ], ion plating [ 94 ], plasma immersion ion implantation and deposition (PIIID) [ 95 ], magnetron sputtering [ 96 ], ion beam sputtering [ 97 ], pulsed laser deposition [ 98 ] and mass selected ion beam deposition [ 99 , 100 ]. Some excellent reviews on DLC films have been published in the past several decades [ 101 , 102 , 103 , 104 , 105 , 106 ].…”
Section: Anti-corrosion and Anti-wear Coatingsmentioning
confidence: 99%