“…Planar cathodes produce plasma densities that are orders of magnitude lower than HIPIMS and I-PVD, yet, planar sputtering can achieve uniform coatings on surfaces within its line-of-sight by leveraging unidirectional deposition via techniques such as collimation and long throw sputtering [2,10,11]. Qualitative tools for planar film deposition, such as structure zone maps, have been developed to predict changes in grain size, microstructure, and morphology, which enable the technique to tailor deposited film mechanical, optical, thermal, and electronic properties [1,[12][13][14][15]. In contrast, due to its target geometry, hollow cathode sputtering is affected by additional factors such as greater plasma densities and a 360°line-of-sight, which in turn affect the microstructure and morphology beyond current structure zone maps representations [1,12,[15][16][17][18].…”