2003
DOI: 10.1143/jjap.42.4193
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Study of Titanium Tungsten Nitride and Tungsten Nitride Schottky Contacts on n-GaN

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Cited by 17 publications
(10 citation statements)
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“…Ternary transition metal nitrides have lately gained special attention (with Ti x Zr 1-x N being the most widely studied) in an effort to improve further these properties [1][2][3][4][5][6][7][8][9][10][11][12].…”
Section: Introductionmentioning
confidence: 99%
“…Ternary transition metal nitrides have lately gained special attention (with Ti x Zr 1-x N being the most widely studied) in an effort to improve further these properties [1][2][3][4][5][6][7][8][9][10][11][12].…”
Section: Introductionmentioning
confidence: 99%
“…The use of transition metal nitride coatings has been successfully explored in the last decades, due to properties like high hardness, biocompatibility, wear and corrosion resistance, electrical conductivity and thermal stability; recently ternary transition metal nitrides are employed in an effort to tailor the lattice constant and electrical, mechanical and optical properties [1][2][3][4][5][6][7][8]. For emerging applications, such as micro-electro-mechanical systems (MEMS) [9,10], the good mechanical behaviour should be combined with desired electronic performance.…”
Section: Introductionmentioning
confidence: 99%
“…a single-phase compound) or as nanocomposites (i.e. consisting of at least two phases), consisting of at least one transition metal, such as: 1) blending two IVb-Vb-VIb metals and nitrogen to form solid solution nitride compounds (with Ti x Zr 1 − x N being the most widely studied) in an effort to improve further their properties [17][18][19][20][21][22][23][24][25][26][27][28][29][30], 2) blending one IVb-Vb-VIb metal, one noble metal (or Ni) and nitrogen to form nanocomposites consisting of a metallic and a ceramic phase [31][32][33][34][35][36][37][38][39][40][41][42][43], 3) blending one IVb-Vb-VIb metal, one group IIIa-IVa (Al, B, Si) element and nitrogen to form either a metastable solid solution nitride phase in a limited compositional range, or superhard nanocomposites consisting of two ceramic phases, which are not topologically compatible, such as nc-TiN/a-SiN x , [1,2,[44][45][46][47][48][49][50][51][52][53][54][55][56][57]…”
Section: Introductionmentioning
confidence: 99%