2006
DOI: 10.1117/12.674215
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Study of ultra-precision diamond turning of a microlens array with a fast tool servo system

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Cited by 14 publications
(7 citation statements)
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“…Equally spaced angles is the most common method used to generate cutter points on -plane spiral cutter tool path, and some typical complex surfaces with high precision are machined using the cutter points generated by equally spaced angles, such as off-axis aspheric surface [1,3,13] and microlens array [14][15][16]. Equally spaced angles refering to the central angles are equal for any adjacent cutter points on the same spiral revolution.…”
Section: Cutter Point Of Equally Spaced Anglesmentioning
confidence: 99%
“…Equally spaced angles is the most common method used to generate cutter points on -plane spiral cutter tool path, and some typical complex surfaces with high precision are machined using the cutter points generated by equally spaced angles, such as off-axis aspheric surface [1,3,13] and microlens array [14][15][16]. Equally spaced angles refering to the central angles are equal for any adjacent cutter points on the same spiral revolution.…”
Section: Cutter Point Of Equally Spaced Anglesmentioning
confidence: 99%
“…The selection of the optimal cutting parameters (depth of cut, feed rate, spindle speed, surface speed and driving frequency of the FTS) in ultra-precision turning of microlens arrays have been researched. To et al [14] investigated the effect of the cutting conditions, such as the depth of cut, feed rate, spindle speed and surface speed, on the microlens array in ultra-precision diamond turning with a fast tool servo (FTS) and found the optimal surface roughness and surface profiles. Yu et al [15] studied the optimal selection of the machining parameters, including the spindle speed, sample number, feed rate and tool geometry, in fabricating a micro-structure surface.…”
Section: Introductionmentioning
confidence: 99%
“…FTS system fetches the angular position signalφ and radial position signal r in real-time, then drives the cutting tool to the desired z position with high frequency and precisely. The principle of FTS machining is shown in Fig 1 [5]. The sketch graph of FTS fabricating is shown in Fig 2. φ φ φ Figure 1: the principle of FTS machining Figure 2: Schematic drawing of FTS fabricating…”
Section: Introductionmentioning
confidence: 99%