Study of uniformity of atmospheric pressure plasma microjet array for maskless parallel micropatterned etching

Yang, Junfeng; Xia, Lu; Zhou, Shuneng; Liao, Lirui; Wang, Zekun; Wen, Li; Yan, KangWei; Wang, Hai; Chu, Jiaru

doi:10.1002/ppap.202100167

Cited by 2 publications

(2 citation statements)

References 33 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Large-scale plasma jet arrays have been applied to multiple fields, such as microorganism inactivation [20], fungi-infected ocular treatment [35], surface hydrophobicity improvement [36] and mask-less micropatterned etching [37]. In these cases, multiple plasma plumes are generated to interact with various surfaces, including dielectrics, metals and biological matter.…”

Section: Introductionmentioning

confidence: 99%

In situ measurement of dynamic surface charge on dielectrics interacted with plasma jet arrays

Zhang

Sun

Han

et al. 2023

Plasma Sources Sci. Technol.

View full text Add to dashboard Cite

As a flexible tool to generate large-scale non-thermal plasma at atmospheric pressure, plasma jet arrays have attracted academic attention from multiple fields of biomedicine and material surface sciences. Optimizations of plasma processing that heavily relied on trial-and-error experiments are requiring quantitative in-situ diagnostics of plasma-surface interaction. This study focuses on the properties of fundamental surface charge evolution on dielectric targets by plasma jet arrays. Special attention is paid to the characteristics and mechanisms of an intriguing convergence of multiple adjacent surface charge patterns by measurements and simulations. The measurement results of the 1D and 2D jet arrays have verified an inevitable tendency of homopolar charge fusion at plasma-surface interface of multiple jets, which was initially thought to be repulsive under electrostatics forces. The fusion of surface charge fusion is considerably enhanced when more charges are transported onto the targeted dielectric at smaller jet separations. The simulation results indicate that when two surface IWs approach in close proximity, the high electric field between their heads provides a cluster of high-energy electrons that causes two IWs to merge until they connect. In the case of extremely small separations, the close-in IWs directly merges in the bulk before touching the target. Quantitative in-situ measurements of surface charges and the corresponding simulations provide a fresh insight into the electrical interaction in the large-scale atmospheric pressure plasmas. The properties of charge fusion can help to manufacture and optimize large-area uniform plasma jet sources for various dielectric materials.

show abstract

Section: Introductionmentioning

confidence: 99%

In situ measurement of dynamic surface charge on dielectrics interacted with plasma jet arrays

Zhang

Sun

Han

et al. 2023

Plasma Sources Sci. Technol.

View full text Add to dashboard Cite

show abstract

“…Additionally, an effective method to ensure the uniformity of each jet is equipping the device with an extra current-limiting resistance [12,13]. Therefore, to meet the large-area treatment requirement of three-dimensional (3D) surfaces, the optimization of structure design and operating parameters of the jet array are relatively challenging [11][12][13][14][15].…”

Section: Introductionmentioning

confidence: 99%

A novel designed 3D multi-microhole plasma jet device driven by nanosecond pulse at atmospheric pressure

Liu

Wang

Pang

et al. 2022

Plasma Sources Sci. Technol.

View full text Add to dashboard Cite

A novel designed three-dimensional (3D) multi-microhole helium plasma jet device excited by nanosecond pulse is developed in atmospheric air. Systematical investigations about the discharge characteristics are carried out to get insights into the formation mechanisms of 3D plasma jets. Results show that the 3D plasma jets originated from the branching of a single ionization wave to present a hexagonal-like structure including bottom jet (BJ) and side jets (SJ1 and SJ2). The BJ always keeps a stable performance while the SJ displays a remarkably turbulent mode. The dynamic evolution, and the propagation velocity and distance for BJ and SJ demonstrate significant differences, with a delay effect between BJ and SJ bullets propagation being observed. The OES show that 3D jets possess a high yield of the spatial distribution of reactive species in jet plumes. The formation mechanism of 3D jets is determined by the hydrodynamic (He flow distribution) and electrical interactions (distribution of electric field force) in the discharge tube emerging from individual holes with different radial directions. The direct treatment of water using this developed underwater 3D plasma device results in the production of plasma activated water (PAW) with a lower pH value, higher conductivity, and greater concentrations of reactive oxygen and nitrogen species (RONS), compared to the indirect treatment. Especially, the concentration of H2O2 can remarkably increase 141 folds from 1.43 to 202.12 μM within 5 mins after the direct 3D plasma treatment. This novel-designed 3D jets-based technique is a promising platform for 3D application scenarios, especially in the case of underwater microbubble discharge, which is of great significance for water activation in emerging applications.

show abstract

Study of uniformity of atmospheric pressure plasma microjet array for maskless parallel micropatterned etching

Cited by 2 publications

References 33 publications

In situ measurement of dynamic surface charge on dielectrics interacted with plasma jet arrays

In situ measurement of dynamic surface charge on dielectrics interacted with plasma jet arrays

A novel designed 3D multi-microhole plasma jet device driven by nanosecond pulse at atmospheric pressure

Contact Info

Product

Resources

About