great potential to be used in the field of high-frequency and high-power systems. [1,2] That is mainly attributed to their excellent physical and electrical properties, including polarization effect induced high 2D electron gas (2DEG) density (1 × 10 13 -1 × 10 14 cm −2 ), relatively high 2DEG mobility (1800-2200 cm 2 (V s) −1 ), high breakdown voltage (3.3 MV cm −1 ), large bandgap (3.4 eV), and high thermal and chemical stabilities. [3] 2DEG, as the key factor affecting and regulating the performance of AlGaN/GaN HEMTs, is mainly formed by large conduction band offset between AlGaN/GaN heterojunctions, and the strong polarization electric field caused by spontaneous polarization and piezoelectric effect. [4,5] In practical applications, the actual parameters of 2DEG concentration and mobility directly affect the output and RF performance of HEMTs, such as the maximum saturated output current density (I ds,max ), threshold voltage (V th ), transconductance values (g m ), maximum frequency (f max ), and cut-off frequency (f T ), etc. Additionally, the electron traps and defects that exist in the devices would also affect the 2DEG in the channel and eventually limit device performance. [6] Due to their excellent performance and stability, AlGaN/GaN HEMTs have been widely used not only in consumer electronics AlGaN/GaN-based high electron mobility transistors (HEMTs) are ideal candidates for power electronics in consumer, industrial, and space applications. Attributed to their excellent performance in electrical output and chemical stability, AlGaN/GaN HEMTs enable tolerant neutron irradiation in harsh environments. Different from high-fluence irradiation-induced device failure, the investigation of low-fluence neutron irradiation is of great significance to understand the early damage mechanism of HEMTs. Here, the modulated electrical properties are presented of AlGaN/GaN HEMTs under low-fluence neutron irradiations of 4.5 × 10 13 and 6.0 × 10 13 cm −2 . After irradiation, the electrical characteristics of the samples are carefully measured, the output performance of different irradiated devices shows a similar change trend, i.e., almost no changes or only decreased slightly (≤14%) near the knee voltage. For leakage current, the samples irradiated with different fluences show different characteristics, including a slight decrease with the fluence of 4.5 × 10 13 cm −2 , and a slight increase with the fluence of 6.0 × 10 13 cm −2 . To further investigate the internal mechanisms, the performance changes are also simulated of the device by using Crosslight software. According to the measurements, it is concluded that the low-fluence neutron irradiation will initially affect the 2DEG mobility and the surface states of the HEMTs.