2012
DOI: 10.1007/s00170-012-4372-0
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Study on the basic characteristics of a vortex bearing element

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Cited by 29 publications
(13 citation statements)
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“…The air rotation inertia force (also known as the centrifugal force) exhibits a cupped pressure that is distributed in the chamber, while the air flowing through the gap between the peripheral flotation plane and the workpiece reaches a high pressure under the action of the viscous friction. It can be concluded from the previous experiments (shown in Figure 9, with selected data from) 12 that when the gap varies slightly within a small range, the state of the rotating flow in the chamber is not affected by the variations in h, i.e. the shape of the pressure distribution exhibits no obvious changes.…”
Section: Resultsmentioning
confidence: 77%
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“…The air rotation inertia force (also known as the centrifugal force) exhibits a cupped pressure that is distributed in the chamber, while the air flowing through the gap between the peripheral flotation plane and the workpiece reaches a high pressure under the action of the viscous friction. It can be concluded from the previous experiments (shown in Figure 9, with selected data from) 12 that when the gap varies slightly within a small range, the state of the rotating flow in the chamber is not affected by the variations in h, i.e. the shape of the pressure distribution exhibits no obvious changes.…”
Section: Resultsmentioning
confidence: 77%
“…(3) We have proposed a design scheme for a flotation element based on a rotation flow (Figure 2c), in which a cylindrical chamber is placed in the centre of the element and the nozzles are aligned in the tangential direction of the chamber. 12 After ejection from the nozzle, the air rotates and forms a rotating flow along the circular wall of the chamber. Because the direction of air injection is parallel to the surface of the glass substrate, the air is not directly ejected onto the substrate surface.…”
Section: Symbol Quantity Fmentioning
confidence: 99%
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“…In our previous research, we analyzed the basic characteristics of a single vortex bearing element, and proved that this type performed better than the traditional orifice-type in terms of bearing stiffness and stress reduction [13]. In this research, we fabricate an air conveyor using vortex bearing elements, and conduct an experimental investigation on the problems that may arise in the actual transporting process to affect the flotation of the substrate.…”
Section: Introductionmentioning
confidence: 99%