Study the target effect on the structural, surface and optical properties of TiO2 thin film fabricated by RF sputtering method

Vyas, Sumit; Tiwary, Rohit; Shubham, Kumar; Chakrabarti, P.

doi:10.1016/j.spmi.2014.10.029

Cited by 46 publications

(11 citation statements)

References 24 publications

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“…(b) and listed in Table S5. It was observed that the direct band gap value of the thin film nitrided at 600 °C was 3.61 eV, which was in agreement with other report for TiO 2 thin film . When the nitridation temperatures increased from 600 °C to 900 °C, the direct band gap of the thin films was found to decrease gradually.…”

Section: Resultssupporting

confidence: 91%

“…The enhancement factor (EF) was determined according to the formula below

E F = ((), I_{SERS} true/ C_{SERS}) true/ ((), I_{r e f} true/ C_{r e f}) .

…”

Section: Resultsmentioning

confidence: 99%

“…It was observed that the direct band gap value of the thin film nitrided at 600°C was 3.61 eV, which was in agreement with other report for TiO 2 thin film. [36] When the nitridation temperatures increased from 600°C to 900°C, the direct band gap of the thin films was found to decrease gradually. The bandgap narrowing was mainly relative with the substitution of the lattice oxygen by nitrogen in the TiO 2 thin films, as confirmed by XRD, XPS and RAMAN.…”

Section: Optical Properties Of Thin Filmsmentioning

confidence: 98%

See 2 more Smart Citations

Composition, microstructure and SERS properties of titanium nitride thin film prepared via nitridation of sol–gel derived titania thin films

Wei

Dong

et al. 2017

J Raman Spectroscopy

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The titanium nitride thin film was successfully prepared via direct nitridation of the sol–gel derived TiO2 thin film at different temperatures in ammonia gas. The composition, microstructure and optical properties of the thin films were characterized in order to investigate their effect on the surface‐enhanced Raman scattering (SERS) performance of the thin films. With the nitridation temperatures increasing, the anatase phase transformed into titanium nitride phase in the films and the concentration of nitrogen incorporation increased accordingly. Consequentially, the sol–gel derived TiO2 thin film was converted to non‐stoichiometry titanium nitride (TiOxNy) thin film, as determined by X‐ray diffraction (XRD), RAMAN and X‐ray photoelectron spectroscopy (XPS). As a result, a blue‐shift of the surface plasmon resonance absorption peaks and narrowing optical band gap of the thin films were observed, leading to the improvement of SERS performance via electromagnetic enhancement mechanism and charge‐transfer effect. In addition, the surface of thin films became gradually rough with the nitridation temperatures increasing, ascribed to the growth of titanium nitride crystal grains. Most of all, the thin films nitrided at 1000 °C had the most rough surface, and many ‘hot spots’ formed on the thin film surface accordingly, which were favorable for enhancing SERS‐active, and thereby the thin films exhibited the largest SERS enhancement. Copyright © 2017 John Wiley & Sons, Ltd.

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Section: Resultssupporting

confidence: 91%

“…The enhancement factor (EF) was determined according to the formula below

E F = ((), I_{SERS} true/ C_{SERS}) true/ ((), I_{r e f} true/ C_{r e f}) .

…”

Section: Resultsmentioning

confidence: 99%

Section: Optical Properties Of Thin Filmsmentioning

confidence: 98%

See 1 more Smart Citation

Composition, microstructure and SERS properties of titanium nitride thin film prepared via nitridation of sol–gel derived titania thin films

Wei

Dong

et al. 2017

J Raman Spectroscopy

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“…Transparent thin films based on titanium dioxide (TiO 2 ) and hafnium dioxide (HfO 2 ) are widely used in industrial applications such as optical and protective coatings or optoelectronic devices. HfO 2 and TiO 2 are characterized by many advantages, e.g., very good thermal, chemical, and mechanical stability and high transparency [1][2][3][4][5]. Both are also known as hard oxides with high wear and scratch resistance to mechanical damage.…”

Section: Introductionmentioning

confidence: 99%

Influence of Material Composition on Structural and Optical Properties of HfO2-TiO2 Mixed Oxide Coatings

et al. 2016

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Abstract:In this paper the influence of material composition on the structural, surface and optical properties of HfO 2 -TiO 2 mixed oxide coatings was investigated and discussed. Five sets of thin films were deposited using reactive magnetron sputtering: HfO 2 , TiO 2 and three sets of mixed HfO 2 -TiO 2 coatings with various titanium content. The change in the material composition had a significant influence on the structural, surface and optical properties. All of the deposited coatings, except for (Hf 0.55 Ti 0.45 )O x , were nanocrystalline with crystallites ranging from 6.7 nm to 10.8 nm in size. Scanning electron microscopy measurements revealed that surface of nanocrystalline thin films consisted of grains with different shapes and sizes. Based on optical transmission measurements, it was shown that thin films with higher titanium content were characterized by a higher cut-off wavelength, refractive index and lower optical band gap energy. The porosity and packing density were also determined.

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“…Various methods has been reported to produce a thin layer of TiO 2 such as electrophoretic deposition [7], electrodeposition [8], doctor blades [9], RF sputtering [10], sol gel [11], dip-coating [12], spin coating, etc. In this study, we use a spin coating method to deposit TiO 2 layer.…”

Section: Introductionmentioning

confidence: 99%

Effect of Aging Time on the Synthesis of Fe-doped TiO2 Thin Films by Spin Coating Method

Dahlan¹

2016

KEG

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The synthesis of Fe-doped TiO 2 thin film using spin coating method was studied. Effects of aging time on the deposited thin film were investigated. Titanium butoxide (C 16 H 36 O 4 Ti) as a precursor solution was mixed with the FeCl 3 . Spin coating process was carried out on three types of precursor solution: (1) spin-coating process performed immediately after the precursor solution was made, (2) spin-coating process performed after solution was aged for 24 hours, (3) aged for 24 and (4) spin-coating after aging the precursor for 72 hours. Heating was carried out on the resulting thin film at temperature of 400 ∘ C. The morphology of TiO 2 layers was characterized using Scanning Electron Microscope (SEM) and Atomic Force Microscope (AFM). Elemental and phase composition of the films was determinedusing EDX and X-ray diffraction (XRD). We found that the best TiO 2 layer is obtained when spin-coating process is done after aging the precursor for 72 hours. The layer shows a more uniform particle distribution on the substrate and a more monodisperse particle size dominated by the anatase phase.

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Study the target effect on the structural, surface and optical properties of TiO2 thin film fabricated by RF sputtering method

Cited by 46 publications

References 24 publications

Composition, microstructure and SERS properties of titanium nitride thin film prepared via nitridation of sol–gel derived titania thin films

Composition, microstructure and SERS properties of titanium nitride thin film prepared via nitridation of sol–gel derived titania thin films

Influence of Material Composition on Structural and Optical Properties of HfO2-TiO2 Mixed Oxide Coatings

Effect of Aging Time on the Synthesis of Fe-doped TiO2 Thin Films by Spin Coating Method

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