SU-8 waveguiding interferometric micro-sensor for gage pressure measurement

Pelletier, Nicolas; Bêche, Bruno; Tahani, Najat; Zyss, Joseph; Camberlein, Lionel; Gaviot, Étienne

doi:10.1016/j.sna.2006.07.012

Cited by 48 publications

(31 citation statements)

References 15 publications

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“…The new technique will be very well suited for fabricating optical integrated circuits. structures [1][2][3][4][5][6][7][8][9] with two individual radiating arms of the same size. Despite various dipole-antenna designs for the purchase of multiband or wideband operation, stand-alone mobile-unit dipole antennas of a small form factor [3][4][5] are more costly by etching/ printing on a printed circuit board than by stamping one piece of metal plates.…”

Section: Discussionmentioning

confidence: 99%

Research and fabrication of a UV curable polymeric 41 × 41 array‐waveguide grating multiplexer

Chen

Zhang

et al. 2007

Micro & Optical Tech Letters

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In this experiment, we could transmit the SSIL signal over 10-km because of the chromatic dispersion effect from the large 3-dB bandwidth of the signal about 0.45 nm. To increase the transmission distance, the bandwidth of the signal should be reduced. Because the reduced bandwidth introduces the lower SNR, however, the alternate SOA for increasing the noise reduction efficiency should be used such as cascaded SOAs [6] or a long length SOA. CONCLUSIONWe successfully demonstrated that a GS-SOA with a holding light could be used as an optical power booster in optical access network using a SSIL source. With the holding light, the signal distortion in the GS-SOA due to the carrier depletion was suppressed and, as a result, the Q-factor was dramatically improved. For a 2.5-Gb/s SSIL signal transmitted over 10 km of SMF, the highest gain-Q-factor product of 96.3 was obtained by using the proposed booster for P in ϭ Ϫ3 dBm and P hl ϭ Ϫ12 dBm. The corresponding BER was lowered to 6 ϫ 10 Ϫ11 . ACKNOWLEDGMENTSThis work was partially supported by KOSEF through grant No. R01-2006-000-11088-0 from the Basic Program. 6. S.-J. Kim, J.-H. Han, J.-S. Lee, and C.-S. Park, Suppression of the intensity noise in a 10 Gbit/s spectrum-sliced incoherent light channel using gain-saturated semiconductor optical amplifiers, Electron The recent and rapid development in demand for optical Internet services and data communication has prompted many research groups to study dense wavelength division multiplexing systems. Specially, array-waveguide grating (AWG) fabricated by using polymeric optical waveguides are attracting considerable interest because of their potential applications in optical communications, optical interconnections, and integrated optics [1][2][3][4]. Key issues in the polymeric waveguide materials include a low propagation loss at 1550-nm wavelength, a high thermal stability and small birefringence, easy control of refractive index, large volume, and low cost production facilities. These features make polymeric AWG devices apt for employing planar light wave circuit technology [5,6]. In the past few years, the rising polymeric SU-8 2005(MicroChem, MA), a kind of thick negative resist with high aspect ratio, high sidewall quality, high transparency (above 400 nm), good self-leveling up capability, and dimensional control is playing a key role in microelectro mechanical systems(MEMS) and micro-optic-electromechanical systems [7][8][9]. It is obvious that the advantages of the resist compared with PMMA are a higher sensitivity and chemical stability [10]. Inducting the negative resist for optical waveguide material, it is very significant for optimizing producing process and enhancing optical performances of AWG device [11,12]. In this article, we discuss the optimized structural properties of the polymeric waveguides by the scanning electron microscope (SEM) images, show the design parameters of the mask, fabrication procedures, and optical performances of the polymeric 41 ϫ 41 AWG device, measure the propagation loss of o...

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Section: Discussionmentioning

confidence: 99%

Research and fabrication of a UV curable polymeric 41 × 41 array‐waveguide grating multiplexer

Chen

Zhang

et al. 2007

Micro & Optical Tech Letters

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“…Additional steps involving plasma treatments have been demonstrated for improving these propagation losses [5]. More complex passive SU8 structures have been realized, such as interferometric structures for thermal, pressure or biological sensors [6][7][8], microresonators [9][10][11], or optical accelerometers [12]. Regarding active SU8-based structures, the main strategy deals with the dispersion of dyes in the SU8 matrix leading to amplified emission of rare-earths [13] or rhodamine [14].…”

Section: Introductionmentioning

confidence: 99%

Transferable Integrated Optical SU8 Devices: From Micronic Waveguides to 1D-Nanostructures

et al. 2015

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Abstract:We report on optical components for integrated optics applications at the micro-and nanoscale. Versatile shapes and dimensions are achievable due to the liquid phase processability of SU8 resist. On the one hand, by adjusting the UV-lithography process, waveguiding structures are patterned and released from their original substrate. They can be replaced on any other substrate and also immerged in liquid wherein they still show off efficient light confinement. On the other hand, filled and hollow 1D-nanostructures are achievable by the wetting template method. By exploiting the large range of available SU8 viscosities, nanowires of diameter ranging between 50 nm and 240 nm, as well as nanotubes of controllable wall thickness are presented. Optical injection, propagation, and coupling in such nanostructures are relevant for highly integrated devices.

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“…[1][2][3][4][5][6] Our group also has been developing silicon-based guided-wave optical pressure sensors, 7,8 microphones, accelerometers, 9 and flow sensors with diaphragms. These sensors have two unique features: guided-wave optical sensing and the use of micromechanical structures.…”

Section: Introductionmentioning

confidence: 99%

Experimental study of sensitivity dependences on waveguide position and diaphragm thickness in silicon-based guided-wave optical accelerometer

et al. 2013

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Abstract. Our group has developed a silicon-based guided-wave optical accelerometer, consisting of a proof mass centered on a diaphragm and a waveguide across the diaphragm. The sensor operates based on phase retardation induced by the elasto-optic effect. Designing the sensor is considerably complicated since it is strongly suggested that sensitivity is related to many parameters, such as waveguide position, diaphragm dimensions, and size and weight of proof mass. Hence, these relations should be clearly identified to establish a design guideline. In this study, sensitivity dependences on waveguide position and diaphragm thickness were experimentally examined. Regarding sensitivity dependence on waveguide position, phase sensitivity was highest for the waveguide at the diaphragm edge and was also relatively high for the waveguide at the edge of proof mass, whereas the sensitivity was quite low around the midposition between the edges of the diaphragm and proof mass. Regarding diaphragm thickness, phase sensitivity was found to be inversely proportional to the square of the diaphragm thickness. © The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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SU-8 waveguiding interferometric micro-sensor for gage pressure measurement

Cited by 48 publications

References 15 publications

Research and fabrication of a UV curable polymeric 41 × 41 array‐waveguide grating multiplexer

Research and fabrication of a UV curable polymeric 41 × 41 array‐waveguide grating multiplexer

Transferable Integrated Optical SU8 Devices: From Micronic Waveguides to 1D-Nanostructures

Experimental study of sensitivity dependences on waveguide position and diaphragm thickness in silicon-based guided-wave optical accelerometer

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