SU8 diaphragm micropump with monolithically integrated cantilever check valves

Ezkerra, A.; Fernández, Luís; Mayora, Kepa; Ruano-Lopez, Jesus M.

doi:10.1039/c1lc20324j

Cited by 17 publications

(11 citation statements)

References 50 publications

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“…The Young’s modulus of 2.0 GPa (Microchem.com) enabled the creation of cantilever-based flexible check valves (Figure 12), which were tested over a series of actuation pressures and flow rates and allowed unidirectional flow. 93 Heyries et al 94 demonstrated an SU-8/PDMS device to quantify allergen-specific antibodies. Proteins from common allergy sources (β-lactoglobulin from milk, peanut lectin and human IgG) were immobilized in an array on a PDMS surface before aligning to the SU-8 cover layer.…”

Section: Materials For Microfluidicsmentioning

confidence: 99%

Advances in Microfluidic Materials, Functions, Integration, and Applications

2013

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Section: Materials For Microfluidicsmentioning

confidence: 99%

Advances in Microfluidic Materials, Functions, Integration, and Applications

2013

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“…7 With the development of microfluidic technologies, there is an increasing demand for fluid pumping techniques with a wide range of flow rates, controllable delivery, compact design, simple fabrication and efficient operation. 8,9 Electroosmotic flow (EOF) pumps have attracted a great deal of attention because of their ability to generate high pumping pressure with continuous pulse-free flow. 10,11 These pumps can also offer precision delivery of small volumetric fluids.…”

Section: Introductionmentioning

confidence: 99%

A handy liquid metal based electroosmotic flow pump

2014

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A room temperature liquid metal based electroosmotic flow (EOF) pump has been proposed in this work. This low-cost EOF pump is convenient for both fabrication and integration. It utilizes polydimethylsiloxane (PDMS) microchannels filled with the liquid-metal as non-contact pump electrodes. The electrode channels are fabricated symmetrically to both sides of the pumping channel, having no contact with the pumping channel. To test the pumping performance of the EOF pump, the mean flow velocities of the fluid (DI water) in the EOF pumps were experimentally measured by tracing the fluorescent microparticles in the flow. To provide guidance for designing a low voltage EOF pump, parametric studies on dimensions of the electrode and pumping channels were performed in this work. According to the experimental results, the pumping speed can reach 5.93 μm s(-1) at a driving voltage of only 1.6 V, when the gap between the electrode and the pumping channel is 20 μm. Injecting a room temperature liquid metal into microchannels can provide a simple, rapid, low-cost but accurately self-aligned way to fabricate microelectrodes for EOF pumps, which is a promising method to achieve the miniaturization and integration of the EOF pump in microfluidic systems. The non-contact liquid electrodes have no influence on the fluid in the pumping channel when pumping, reducing Joule heat generation and preventing gas bubble formation at the surface of electrodes. The pump has great potential to drive a wide range of fluids, such as drug reagents, cell suspensions and biological macromolecule solutions.

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“…The micropump/valve is the “beating heart” of a microfluidic system [1], [2]. The development of a miniaturized, portable, low cost and easy operation micropump/valve is important [3], [4].…”

Section: Introductionmentioning

confidence: 99%

A Microfluidic Pump/Valve Inspired by Xylem Embolism and Transpiration in Plants

Liu

et al. 2012

PLoS ONE

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In plants, transpiration draws the water upward from the roots to the leaves. However, this flow can be blocked by air bubbles in the xylem conduits, which is called xylem embolism. In this research, we present the design of a biomimetic microfluidic pump/valve based on water transpiration and xylem embolism. This micropump/valve is mainly composed of three parts: the first is a silicon sheet with an array of slit-like micropores to mimic the stomata in a plant leaf; the second is a piece of agarose gel to mimic the mesophyll cells in the sub-cavities of a stoma; the third is a micro-heater which is used to mimic the xylem embolism and its self-repairing. The solution in the microchannels of a microfluidic chip can be driven by the biomimetic “leaf” composed of the silicon sheet and the agarose gel. The halting and flowing of the solution is controlled by the micro-heater. Results have shown that a steady flow rate of 1.12 µl/min can be obtained by using this micropump/valve. The time interval between the turning on/off of the micro-heater and the halt (or flow) of the fluid is only 2∼3 s. This micropump/valve can be used as a “plug and play” fluid-driven unit. It has the potential to be used in many application fields.

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SU8 diaphragm micropump with monolithically integrated cantilever check valves

Cited by 17 publications

References 50 publications

Advances in Microfluidic Materials, Functions, Integration, and Applications

Advances in Microfluidic Materials, Functions, Integration, and Applications

A handy liquid metal based electroosmotic flow pump

A Microfluidic Pump/Valve Inspired by Xylem Embolism and Transpiration in Plants

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