Sub-10 nm feature chromium photomasks for contact lithography patterning of square metal ring arrays

Park, Woongkyu; Rhie, Jiyeah; Kim, Na Yeon; Hong, Seunghun; Kim, Dai‐Sik

doi:10.1038/srep23823

Cited by 16 publications

(13 citation statements)

References 34 publications

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“…Such a wavelength, however, requires a quartz glass slide and also allows us to use UV-sensitive PMMA-based electron resists. Potentially, a nanometer resolution could be achieved via various sophisticated methods of mask production [ 44 , 45 ] essentially exploiting the near-field exposure.…”

Section: Discussionmentioning

confidence: 99%

Micromask Lithography for Cheap and Fast 2D Materials Microstructures Fabrication

et al. 2021

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The fast and precise fabrication of micro-devices based on single flakes of novel 2D materials and stacked heterostructures is vital for exploration of novel functionalities. In this paper, we demonstrate a fast high-resolution contact mask lithography through a simple upgrade of metallographic optical microscope. Suggested kit for the micromask lithography is compact and easily compatible with a glove box, thus being suitable for a wide range of air-unstable materials. The shadow masks could be either ordered commercially or fabricated in a laboratory using a beam lithography. The processes of the mask alignment and the resist exposure take a few minutes and provide a micrometer resolution. With the total price of the kit components around USD 200, our approach would be convenient for laboratories with the limited access to commercial lithographic systems.

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Section: Discussionmentioning

confidence: 99%

Micromask Lithography for Cheap and Fast 2D Materials Microstructures Fabrication

et al. 2021

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“…To realize such large-area sample with high-resolution patterning, various recipes have been introduced, e.g. fs-laser machining for microscale punctured structures [64,241,242], focused ion beam [243,244], e-beam lithography [245,246], and photolithography techniques [125,247,248] for metamaterial structures and, finally, atomic layer deposition (ALD) for atomic-scale gap structures [75,193,249,250]. For nanoscale gap structures, photolithography can be considered as a promising fabrication method for mass production at the same time, as shown in Figure 16.…”

Section: Fabrication Of Wafer-scale Nanogap Arraysmentioning

confidence: 99%

Terahertz wave interaction with metallic nanostructures

2018

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Understanding light interaction with metallic structures provides opportunities of manipulation of light, and is at the core of various research areas including terahertz (THz) optics from which diverse applications are now emerging. For instance, THz waves take full advantage of the interaction to have strong field enhancement that compensates their relatively low photon energy. As the THz field enhancement have boosted THz nonlinear studies and relevant applications, further understanding of light interaction with metallic structures is essential for advanced manipulation of light that will bring about subsequent development of THz optics. In this review, we discuss THz wave interaction with deep sub-wavelength nano structures. With focusing on the THz field enhancement by nano structures, we review fundamentals of giant field enhancement that emerges from non-resonant and resonant interactions of THz waves with nano structures in both sub- and super- skin-depth thicknesses. From that, we introduce surprisingly simple description of the field enhancement valid over many orders of magnitudes of conductivity of metal as well as many orders of magnitudes of the metal thickness. We also discuss THz interaction with structures in angstrom scale, by reviewing plasmonic quantum effect and electron tunneling with consequent nonlinear behaviors. Finally, as applications of THz interaction with nano structures, we introduce new types of THz molecule sensors, exhibiting ultrasensitive and highly selective functionalities.

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“…Because they can generate high-intensity nano-scale electromagnetic radiation in a fraction of a second, the modern development of plasmon lasers today has sparked the investigation of nanoscience and technology. This would enable more feature sizes than the conventional lasers [ 22 , 23 ]. They could also be used to package additional information onto storage media such as hard disks or DVDs [ 24 , 25 ].…”

Section: Advances In Photonicsmentioning

confidence: 99%

Introduction to Photonics: Principles and the Most Recent Applications of Microstructures

et al. 2018

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Light has found applications in data transmission, such as optical fibers and waveguides and in optoelectronics. It consists of a series of electromagnetic waves, with particle behavior. Photonics involves the proper use of light as a tool for the benefit of humans. It is derived from the root word “photon”, which connotes the tiniest entity of light analogous to an electron in electricity. Photonics have a broad range of scientific and technological applications that are practically limitless and include medical diagnostics, organic synthesis, communications, as well as fusion energy. This will enhance the quality of life in many areas such as communications and information technology, advanced manufacturing, defense, health, medicine, and energy. The signal transmission methods used in wireless photonic systems are digital baseband and RoF (Radio-over-Fiber) optical communication. Microwave photonics is considered to be one of the emerging research fields. The mid infrared (mid-IR) spectroscopy offers a principal means for biological structure analysis as well as nonintrusive measurements. There is a lower loss in the propagations involving waveguides. Waveguides have simple structures and are cost-efficient in comparison with optical fibers. These are important components due to their compactness, low profile, and many advantages over conventional metallic waveguides. Among the waveguides, optofluidic waveguides have been found to provide a very powerful foundation for building optofluidic sensors. These can be used to fabricate the biosensors based on fluorescence. In an optical fiber, the evanescent field excitation is employed to sense the environmental refractive index changes. Optical fibers as waveguides can be used as sensors to measure strain, temperature, pressure, displacements, vibrations, and other quantities by modifying a fiber. For some application areas, however, fiber-optic sensors are increasingly recognized as a technology with very interesting possibilities. In this review, we present the most common and recent applications of the optical fiber-based sensors. These kinds of sensors can be fabricated by a modification of the waveguide structures to enhance the evanescent field; therefore, direct interactions of the measurand with electromagnetic waves can be performed. In this research, the most recent applications of photonics components are studied and discussed.

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Sub-10 nm feature chromium photomasks for contact lithography patterning of square metal ring arrays

Cited by 16 publications

References 34 publications

Micromask Lithography for Cheap and Fast 2D Materials Microstructures Fabrication

Micromask Lithography for Cheap and Fast 2D Materials Microstructures Fabrication

Terahertz wave interaction with metallic nanostructures

Introduction to Photonics: Principles and the Most Recent Applications of Microstructures

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