2000
DOI: 10.1143/jjap.39.6157
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Submicron Nonvolatile Memory Cell Based on Reversible Phase Transition in Chalcogenide Glasses

Abstract: Electrically rewritable nonvolatile memories using chalcogenide semiconductors were studied. The memory cell size was changed from 0.3 to 1.5 µmφ using a focused ion beam. This material can be used for nonvolatile random access memory. Reversible phase transition between the amorphous and crystalline states, which is accompanied by a considerable change in electrical resistivity, is exploited to store bits of information. The currents for write/erase were decreased with reducing memory cell size. In the memory… Show more

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Cited by 68 publications
(35 citation statements)
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“…However, the electronic contribution in Ge 2 Sb 2 Te 5 forms a relatively small part of the overall thermal conductivity, as can be estimated via the Weidemann-Franz relationship 21 using an activationtype temperature dependence of electrical conductivity. 22,23 Indeed, thermal-conductivity measurements of other amorphous chalcogenides showed little more than a few tens of percent increase in thermal conductivity for temperatures ranging from ambient right up to the crystallization temperature. 24,25 The assumption of a constant thermal conductivity over the temperature ranges of interest in this work is not therefore overly restrictive, and a value of 0.4 W/m K at the transition temperature ͑lying between the amorphous and crystalline values͒ is used.…”
Section: Temperature Gradientmentioning
confidence: 99%
“…However, the electronic contribution in Ge 2 Sb 2 Te 5 forms a relatively small part of the overall thermal conductivity, as can be estimated via the Weidemann-Franz relationship 21 using an activationtype temperature dependence of electrical conductivity. 22,23 Indeed, thermal-conductivity measurements of other amorphous chalcogenides showed little more than a few tens of percent increase in thermal conductivity for temperatures ranging from ambient right up to the crystallization temperature. 24,25 The assumption of a constant thermal conductivity over the temperature ranges of interest in this work is not therefore overly restrictive, and a value of 0.4 W/m K at the transition temperature ͑lying between the amorphous and crystalline values͒ is used.…”
Section: Temperature Gradientmentioning
confidence: 99%
“…In recent years, the main focus of phase-change data-storage research returned to resistance switching. So-called chalcogenide or phase-change random access memory (CRAM/PRAM) and ovonic unified memory (OUM) based on the phase-dependent resistance switching are currently under intense investigations, [5][6][7][8][9][10][11][12][13] because they show great promise as next-generation nonvolatile solid-state memory replacing flash memory. In certain chalcogenides a special phenomenon of polaritydependent resistance switching (induced by an electric field) has been identified.…”
mentioning
confidence: 99%
“…The temperature dependence of the sheet resistance in the amorphous phase follows an activation-type relation 6 . To estimate the activation barrier for transport E a , given in the temperature dependence of the conductivity ,…”
Section: Resultsmentioning
confidence: 99%