“…Specifically, related results that connect control performance and model validation based on these normalized coprime factorizations are reported in Steele and Vinnicombe (2001) and Date and Cantoni (2005). The dualYoula-Kučera structure (Anderson, 1998;de Callafon and Van den Hof, 1997;Douma & Van den Hof, 2005) further refines these coprime factorization-based model uncertainty structures by excluding candidate models that are not stabilized by the controller that is used during the identification experiment. In this respect, the dual-Youla-Kučera model uncertainty structure constitutes a necessary step to satisfy Requirement R2 by excluding falsified models based on the actual experimental conditions.…”
“…Specifically, related results that connect control performance and model validation based on these normalized coprime factorizations are reported in Steele and Vinnicombe (2001) and Date and Cantoni (2005). The dualYoula-Kučera structure (Anderson, 1998;de Callafon and Van den Hof, 1997;Douma & Van den Hof, 2005) further refines these coprime factorization-based model uncertainty structures by excluding candidate models that are not stabilized by the controller that is used during the identification experiment. In this respect, the dual-Youla-Kučera model uncertainty structure constitutes a necessary step to satisfy Requirement R2 by excluding falsified models based on the actual experimental conditions.…”
The Virtual Reference Feedback Tuning (VRFT) is a data based method for the design of feedback controllers. In the original formulation, the VRFT method gives a solution to the one degree of freedom model-reference control problem in which the objective is to shape the input-output transfer function of the control system. In this paper, the extension of the method to the design of two degree of freedom controllers is presented and discussed.
“…Observe that C RP (P) in general depends in a complicated manner on P, hence the use of C RP (P) in an identification criterion is not directly possible. Thereto, as in [9], [10], an upper bound is employed, leading to the robust-control-relevant identification criterion…”
Section: Robust-control-relevant System Identification Proceduresmentioning
confidence: 99%
“…In fact, the wafer stage system that is considered in this paper is openloop unstable due to a contactless operation, hence system identification has to be performed in closed-loop. In the case where C exp is not sufficiently close to C RP (P), then (6) and (8) may be solved iteratively, leading to a monotonous performance improvement [9]. Using the results presented in this paper, unnecessary conservatism is avoided.…”
Section: Robust-control-relevant System Identification Proceduresmentioning
Abstract-Next-generation precision motion systems are lightweight to meet stringent requirements regarding throughput and accuracy. Such lightweight systems typically exhibit lightly damped flexible dynamics in the controller cross-over region. State-of-the-art modeling and motion control design procedures do not deliver the required model fidelity to control the flexible dynamical behavior. In this paper, identification and control challenges are investigated and a novel approach for next-generation motion control is presented. The procedure is applied to a multivariable wafer stage, confirming a significant performance improvement.
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