2007
DOI: 10.1117/12.697133
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Subpicosecond vacuum ultraviolet laser system for advanced materials processing

Abstract: We have been developing the vacuum ultraviolet (VUV) light sources and novel applications using such short wavelength emission sources. High quality amorphous Si thin films were successfully produced at room temperature as a result of photo-dissociation of SiH 4 gas by using an Ar 2 * excimer lamp irradiation at 126 nm. To enhance such novel VUV processing applications, a compact VUV amplifier at 126 nm was developed by use of the optical-field-ionization (OFI) electrons. The gain-length product around 5 was o… Show more

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Cited by 7 publications
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References 13 publications
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