Subsurface analysis of semiconductor structures with helium ion microscopy

Gastel, Raoul van; Hlawacek, Gregor; Zandvliet, Henricus J.W.; Poelsema, Bene

doi:10.1016/j.microrel.2012.06.130

Cited by 21 publications

(15 citation statements)

References 16 publications

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“…7, results of a HIM study on the subsurface formation of Pd interconnects are presented. 74 While a large degree of surface detail is present in the SE image presented in Fig. 7(a), no direct indication of the buried Pd 2 Si interconnect is visible.…”

Section: B Subsurface Imagingmentioning

confidence: 94%

Helium ion microscopy

Hlawacek

Veligura

Gastel

et al. 2014

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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213

155

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Helium ion microcopy based on gas field ion sources represents a new ultrahigh resolution microscopy and nanofabrication technique. It is an enabling technology that not only provides imagery of conducting as well as uncoated insulating nanostructures but also allows to create these features. The latter can be achieved using resists or material removal due to sputtering. The close to free-form sculpting of structures over several length scales has been made possible by the extension of the method to other gases such as neon. A brief introduction of the underlying physics as well as a broad review of the applicability of the method is presented in this review.

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Section: B Subsurface Imagingmentioning

confidence: 94%

Helium ion microscopy

Hlawacek

Veligura

Gastel

et al. 2014

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

Self Cite

213

155

View full text Add to dashboard Cite

show abstract

“…We propose to read out samples with recently developed Helium Ion beam Microscopy (HIM) [103], which has spatial resolution similar to EM. However, it causes less sample damage than EM [104] and is capable of sub-surface imaging to depths of O(100) nm. Further progress with respect to the two-dimensional readout with EM or AFM can be made by using a Focused Ion Beam (FIB) of either neon or gallium ions for sample preparation (for example, see [105]).…”

Section: Read-out Methodsmentioning

confidence: 99%

Paleo-detectors: Searching for dark matter with ancient minerals

et al. 2019

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We explore paleo-detectors as an approach to the direct detection of Weakly Interacting Massive Particle (WIMP) dark matter radically different from conventional detectors. Instead of instrumenting a (large) target mass in a laboratory in order to observe WIMP-induced nuclear recoils in real time, the approach is to examine ancient minerals for traces of WIMP-nucleus interactions recorded over timescales as large as 1 Gyr. Here, we discuss the paleo-detector proposal in detail, including background sources and possible target materials. In order to suppress backgrounds induced by radioactive contaminants such as uranium, we propose to use minerals found in marine evaporites or in ultra-basic rocks. We estimate the sensitivity of paleo-detectors to spin-independent and spin-dependent WIMP-nucleus interactions. The sensitivity to low-mass WIMPs with masses mχ 10 GeV extends to WIMP-nucleon cross sections many orders of magnitude smaller than current upper limits. For heavier WIMPs with masses mχ 30 GeV cross sections a factor of a few to ∼ 100 smaller than current upper limits can be probed by paleo-detectors.

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“…The system is equipped with a standard Everhardt Thornley Detector to record secondary electron (SE) based images. In addition, detectors to count back scattered helium (BSHe) [11,28] measure their energy [29,30] and collect photons to enable ionoluminescence [31,32] studies of materials are present. The presented images were recorded using a sample tilt of 35°to exploit channeling into the underlying bulk crystal.…”

Section: Methodsmentioning

confidence: 99%

Visualization of steps and surface reconstructions in Helium Ion Microscopy with atomic precision

et al. 2016

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Helium Ion Microscopy is known for its surface sensitivity and high lateral resolution. Here, we present results of a Helium Ion Microscopy based investigation of a surface confined alloy of Ag on Pt(111). Based on a change of the work function of 25 meV across the atomically flat terraces we can distinguish Pt rich from Pt poor areas and visualize the single atomic layer high steps between the terraces. Furthermore, dechanneling contrast has been utilized to measure the periodicity of the hcp/fcc pattern formed in the 2-3 layers thick Ag/Pt alloy film. A periodicity of 6.65 nm along the ⟨112⟩ surface direction has been measured. In terms of crystallography a hcp domain is obtained through a lateral displacement of a part of the outermost layer by 1/ √ 3 of a nearest neighbour spacing along ⟨112⟩. This periodicity is measured with atomic precision: coincidence between the Ag and the Pt lattices is observed for 23 Ag atoms on 24 Pt atoms. The findings are perfectly in line with results obtained with Low Energy Electron Microscopy and Phase Contrast Atomic Force Microscopy.

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Subsurface analysis of semiconductor structures with helium ion microscopy

Cited by 21 publications

References 16 publications

Helium ion microscopy

Helium ion microscopy

Paleo-detectors: Searching for dark matter with ancient minerals

Visualization of steps and surface reconstructions in Helium Ion Microscopy with atomic precision

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