1998
DOI: 10.1117/12.307044
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Subsurface damage and polishing compound affect the 355-nm laser damage threshold of fused silica surfaces

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Cited by 97 publications
(48 citation statements)
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“…Camp et al 11 found that subsurface damage affected the LIDT of fused silica, but also found that RMS roughness was only weakly linked to subsurface damage and was not a good indicator of LIDT. The surface flatness measurements were used as a general indicator of surface quality.…”
Section: Sample Preparationmentioning
confidence: 99%
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“…Camp et al 11 found that subsurface damage affected the LIDT of fused silica, but also found that RMS roughness was only weakly linked to subsurface damage and was not a good indicator of LIDT. The surface flatness measurements were used as a general indicator of surface quality.…”
Section: Sample Preparationmentioning
confidence: 99%
“…Magee et al 15 have shown that PBS measurements are linked to both subsurface defects and laser damage in fused silica. The penetration depth of the PBS laser was estimated to be 0.05 μm in ZGP, 14 which is within the uppermost 'polished' defect layer which can extend from 0.1 to 1 μm according to Camp et al 11 Subsurface defects from polishing/grinding are estimated to extend to depths up to 100 μm and deformed or strained layers are estimated to extend to depths of 200 μm. 11 The relatively shallow penetration depth made the PBS measurements much more of an indicator of surface scatter rather than subsurface defects in ZGP.…”
Section: Sample Preparationmentioning
confidence: 99%
See 1 more Smart Citation
“…In addition to the mechanical damage itself, such surface and subsurface cracks can serve as sites that can trap optically absorbing species, such as iron, ceria, and other contaminants, which are typically present in the polishing process. While improvement in damage initiation density can be realized by utilizing zirconia-based polishing slurries 13 , conventional lap polishing inevitably results in both surface and subsurface mechanical damage due to the high normal loads present from the weight of the optic on the lap bed. Because of this, the subsurface damage layer persists regardless of how careful one is in controlling the process.…”
Section: Laser Resistant Large-aperture Opticsmentioning
confidence: 99%
“…It is a fact that laser-induced damage of AR coatings was a limiting factor on reliable operation of such high-power solid-state lasers. Many studies on how to improve transmittance element damage threshold have been carried out over the past decades years [5][6][7][8]. Among these studies, understanding the origin and mechanisms of laser-induced damage was important for the improvement of the laser radiation resistivity of the AR coatings.…”
Section: Introductionmentioning
confidence: 99%