IEEE MTT-S International Microwave Symposium Digest
DOI: 10.1109/mwsym.1989.38756
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Super low noise AlGaAs/GaAs HEMT with one tenth micron gate

Abstract: Low noise AlGaAs/GaAs HEMT with 0.1 pm gate length have been successfully developed.A state-of-the-art low noise figure of 0.51 dB and 1.9 dB are obtained at 18 GHz and 40 GHz at room temperature, with an associated gain of lO.8dB and 5.3dB.respectively.The performance has been achieved by shortening the gate length to 0.1 p m and also by lowering the gate resistance drastically with a T shaped gate structure.

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Cited by 16 publications
(3 citation statements)
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“…This indicates that AlGaN/GaN HEMTs on SiC have better robustness on microwave noise performance. Though the robustness of the device on the sapphire substrate is not as good as that of devices on SiC, it still exhibited an of 2.14 dB and a of 7.56 dB at V. These noise performances of our AlGaN/GaN HEMTs are comparable with those of GaAs-based HEMTs [12] and MESFETs [13], but with much better robustness since these devices can be biased at high biases and still exhibited respectable noise figures. Fig.…”
Section: Microwave Noise Characteristicsmentioning
confidence: 67%
“…This indicates that AlGaN/GaN HEMTs on SiC have better robustness on microwave noise performance. Though the robustness of the device on the sapphire substrate is not as good as that of devices on SiC, it still exhibited an of 2.14 dB and a of 7.56 dB at V. These noise performances of our AlGaN/GaN HEMTs are comparable with those of GaAs-based HEMTs [12] and MESFETs [13], but with much better robustness since these devices can be biased at high biases and still exhibited respectable noise figures. Fig.…”
Section: Microwave Noise Characteristicsmentioning
confidence: 67%
“…The modeled noise resistance, though, was not correct, as it was from 0.2 to 0.5 over the measured value. Typical drain current noise was 5 10 A Hz and gate current noise of 7 10 A Hz. Comparing both, one sees that both work well at predicting the and optimum source reflection-coefficient magnitude.…”
Section: Modelingmentioning
confidence: 99%
“…This has led to the investigation of ultrathin gate fabrication for FETs. 1,2 One of the most important and fundamental technologies for fabricating integrated circuits ͑ICs͒ is 100 nm class gate-pattern formation with WSiN, which has high electric and heat tolerance. [3][4][5][6] We have investigated the etching characteristics of WSiN gates by using an electroncyclotron-resonance ͑ECR͒ ion stream in a SF 6 -CF 4 -SiF 4 -O 2 gas mixture and fabricated 100 nm wide WSiN gates for ultrahigh-speed GaAs MESFETs.…”
Section: Introductionmentioning
confidence: 99%