Surface acoustic wave devices

Müller, Claus; Nateprov, A. A.; Obermeier, G.; Klemm, Matthias; Tsurkan, V.; Wixforth, Achim; Tidecks, R.; Horn, S.

doi:10.1117/12.714700

Cited by 3 publications

(2 citation statements)

References 21 publications

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“…Currently, based on surface acoustic waves, there are sensors of temperature, pressure, humidity, as well as sensors that are capable of detecting any changes in the electric field on the surface [5].…”

Section: Formulation Of the Problemmentioning

confidence: 99%

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The influence of adsorbed atoms concentration on the temperature coefficient of resonant frequency of the quasi-Rayleigh wave

Seneta¹,

Peleshchak²,

Nesterivskyi³

et al. 2021

Condens. Matter Phys.

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Within the model of self-consistent connection of quasi-Rayleigh wave with adsorbed atoms, a method of constructing a new class of radiometric sensors of the temperature and concentration of adsorbed atoms on the surface acoustic waves is proposed. Based on the developed theory of the dispersion and acoustic mode width of a quasi-Rayleigh wave on the adsorbed surface of monocrystals with a Zinc blende structure, the temperature coefficient of the resonant frequency of the surface acoustic wave is calculated depending on the temperature and on the concentration of adsorbed atoms.

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Section: Formulation Of the Problemmentioning

confidence: 99%

“…The use of surface acoustic waves in electronic devices was presented in many modern works [1][2][3][4][5]. In the work [1], the operating principles of devices on the surface acoustic waves were described.…”

Section: Introductionmentioning

confidence: 99%

The influence of adsorbed atoms concentration on the temperature coefficient of resonant frequency of the quasi-Rayleigh wave

Seneta¹,

Peleshchak²,

Nesterivskyi³

et al. 2021

Condens. Matter Phys.

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Low-temperature atomic layer deposition of ZnO thin films: Control of crystallinity and orientation

et al. 2011

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Direct observation of the lattice precursor of the metal-to-insulator transition in V2O3 thin films by surface acoustic waves

Kündel¹,

Pontiller²,

Müller³

et al. 2013

Applied Physics Letters

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A surface acoustic wave (SAW) delay line is used to study the metal-to-insulator (MI) transition of V2O3 thin films deposited on a piezoelectric LiNbO3 substrate. Effects contributing to the sound velocity shift of the SAW which are caused by elastic properties of the lattice of the V2O3 films when changing the temperature are separated from those originating from the electrical conductivity. For this purpose the electric field accompanying the elastic wave of the SAW has been shielded by growing the V2O3 film on a thin metallic Cr interlayer (coated with Cr2O3), covering the piezoelectric substrate. Thus, the recently discovered lattice precursor of the MI transition can be directly observed in the experiments, and its fine structure can be investigated.

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Surface acoustic wave devices

Cited by 3 publications

References 21 publications

The influence of adsorbed atoms concentration on the temperature coefficient of resonant frequency of the quasi-Rayleigh wave

The influence of adsorbed atoms concentration on the temperature coefficient of resonant frequency of the quasi-Rayleigh wave

Low-temperature atomic layer deposition of ZnO thin films: Control of crystallinity and orientation

Direct observation of the lattice precursor of the metal-to-insulator transition in V2O3 thin films by surface acoustic waves

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