The transition metal-main-group atom cluster HFe4(C0)12N has been studied as a potential molecular precursor for the production of thin films that contain amorphous iron nitride phases. Films 300-500 A thick are formed by chemical vapor deposition at 160-180 "C on glass substrates. Analysis by X-ray photoelectron spectroscopy shows =lo% nitrogen and low oxygen and carbon impurities. X-ray diffraction shows the presence of an a-Fe phase. Mossbauer spectoscopy of the purest films confirms the presence of a-Fe and, in agreement with the atomic composition, shows an equally abundant nitride phase which is probably due to 7'-Fe4N. Mass spectrometric analysis of the gas-phase products shows the presence of CO, which is the major gaseous product in the deposition, but low levels of H2, NHs, and C02 are also identified as pyrolysis products of HFe4(C0)12N. The iron nitride film appears to be very similar to that produced by reactive sputtering of iron in argon in the presence of N2 and H2 in a 1:l ratio.