Surface preparation for the heteroepitactic growth of ceramic thin films

Norton, M. Grant; Summerfelt, Scott R.; Carter, C. Barry

doi:10.1063/1.103246

Cited by 95 publications

(24 citation statements)

References 4 publications

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“…In the process of epitaxial high-T c superconducting thin film fabrication by DC sputtering, there are many parameters involved which all have to be taken into account. The YBCO thin film growth conditions of major importance are substrate preparation [5,6], target condition, target-substrate distance, gas mixture, growth temperature, deposition rate, oxygenation temperature and cooling rate. All these parameters should be optimized to obtain reproducible, homogeneous and epitaxial c-axis thin films on different substrates.…”

Section: Introductionmentioning

confidence: 99%

Effect of deposition conditions on YBa2Cu3O7−δ thin films by inverted cylindrical magnetron sputtering and substrate effects

Avci

Tepe

Abukay

2004

Solid State Communications

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The dependence of YBCO thin film properties on the deposition conditions was studied for different substrates. The deposition conditions were optimized for the epitaxial growth of high quality YBCO thin films of 1500 Å thickness onto single crystal (100-oriented) SrTiO 3 (STO), MgO and LaAlO 3 (LAO) substrates by DC Inverted Cylindrical Magnetron Sputtering (ICMS). The samples were investigated in detail by means of X-ray diffraction analysis (XRD), EDX, AFM, r -T; magnetic susceptibility and current -voltage ðI -VÞ characterizations. The samples show strong diamagnetic behavior and sharp transition temperatures of 89 -91 K with DT , 0:5 K. XRD of the samples exhibited highly c-axis orientation. The full width at half maximum (FWHM) values of the rocking curves were ranging typically from 0.22 to 0.288. The samples have smooth surfaces as shown from AFM micrographs. The surface roughness, R a , changed between 5 -7 nm. I -V characteristics were obtained from the 20 mm-wide microbridges, which were patterned by a laser writing technique. The critical current densities (J c ; 1.06 £ 10 6 for LAO-based YBCO, 1.39 £ 10 6 for MgO-based YBCO, 1.67 £ 10 6 A/cm 2 for STO based YBCO) of the microbridges were evaluated from I -V curves at 77 K. q

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Section: Introductionmentioning

confidence: 99%

Effect of deposition conditions on YBa2Cu3O7−δ thin films by inverted cylindrical magnetron sputtering and substrate effects

Avci

Tepe

Abukay

2004

Solid State Communications

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“…In either case, it was necessary to eliminate the damaged surface before coating in order to obtain a clear pattern. This process has been demonstrated directly by TEM (Norton, 1990;Susnitzky and Carter, 1992).…”

Section: Surface Qualitymentioning

confidence: 91%

EBSD of Ceramic Materials

Farrer

Michael

Carter

2000

Electron Backscatter Diffraction in Materials Science

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The term "ceramics" covers a very broad range of materials. By definition, ceramies include all nonmetallic inorganic solids, containing both nonmetallic and metallic constituents ; the interatomic bonds thus usually have both ionic and covalent character. The usefulness of ceramies in a wide variety of applications sterns from properties such as hardness and resistance to heat, corrosion, and electricity. Ceramies are sometimes divided into two groups known as "traditional ceramics" and "new ceramies" (Kingery et al., 1976). The traditional ceramies include those primarily in the silicate industries (e.g ., whitewares) and refractories. The new ceramies include electro-optic ceramies, magnet ic ceramics, single crystals used for thin-film substrates, those used in the nuclear industry, and pure oxide ceramies to name a few (Kingery et al., 1976). The study of ceramies using electron backscatter diffraction (EBSD) has not yet extended into all of these areas of ceramics. However, EBSD research of certain ceramies has received considerable attention, and this will be the focus ofthis review.Ceramies used in many applications today are polycrystalline and polyphase materials with grain sizes that typically vary between about 0.1 and 10 um; this range of grain sizes means that x-ray diffraction (XRD) usually cannot be used to determine local crystal orientations. In addition, many ceramies possess a complex crystal structure coupled with anisotropie materials properties, making routine transmission electron .microscopy (TEM) analysis difficult. The phase and orientation of the grains, and the properties and microstructure of the grain boundaries , have a large influence on the useful properties of these materials. Therefore, it is essential to have a characterization technique that can readily provide information such as grain size, orientation, and phase. In this context, EBSD can make extensive contributions to the crystallographic and structural analyses of

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“…These discs were sintered at 1600 • C for 15 h. All the process was carried out in air. The substrates used in the present study were single side polished (100) MgO single crystal substrates of the dimension 10 mm × 10 mm × 0.5 mm annealed at 1000 • C for 10 h as it is reported that the annealed MgO substrates yield better results [16,17]. The MgO substrate was mounted on a rotating metal disc substrate holder using silver paste, and the metal substrate holder was irradiated by a lamp heater.…”

Section: Methodsmentioning

confidence: 99%

Thermal Etching of 6H–SiC Substrate Surface

Nishiguchi

Ohshima

Nishino

2003

Jpn. J. Appl. Phys.

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We report the in situ epitaxial growth of NdBa 2 Cu 3 O 7−δ thin films on (100) MgO substrates with Ba 2 NdTaO 6 , a new dielectric buffer layer, by pulsed laser deposition for the first time. It is found that by using Ba 2 NdTaO 6 dielectric material as a buffer layer for the growth of NdBa 2 Cu 3 O 7−δ films over (100) MgO substrate, the in-plane misalignment of the NdBa 2 Cu 3 O 7−δ grains can be eliminated. The NdBa 2 Cu 3 O 7−δ films grown on Ba 2 NdTaO 6 buffered MgO gave a zero resistance superconducting transition of 93.5 K, which was remarkably higher than the NdBa 2 Cu 3 O 7−δ films grown on MgO. Also the NdBa 2 Cu 3 O 7−δ films grown on Ba 2 NdTaO 6 buffered MgO substrates show a narrower superconducting transition width (∼0.5 K) and better normal state metallicity (R 300 /R 100 ) than the NdBa 2 Cu 3 O 7−δ films grown on bare MgO substrate. Our results indicate that Ba 2 NdTaO 6 is a promising buffer layer material for the growth of epitaxial NdBa 2 Cu 3 O 7−δ films on MgO substrate.

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Surface preparation for the heteroepitactic growth of ceramic thin films

Cited by 95 publications

References 4 publications

Effect of deposition conditions on YBa2Cu3O7−δ thin films by inverted cylindrical magnetron sputtering and substrate effects

Effect of deposition conditions on YBa2Cu3O7−δ thin films by inverted cylindrical magnetron sputtering and substrate effects

EBSD of Ceramic Materials

Thermal Etching of 6H–SiC Substrate Surface

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