2011
DOI: 10.1016/j.cap.2011.04.024
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Surface treatment for Cu metallization on polyimide film by atmospheric pressure dielectric barrier discharge plasma system

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Cited by 15 publications
(11 citation statements)
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“…Among various plasma effects—such as etching, heat damage, and metallization or polymerization of single materials on the biomaterial surfaces—measurements of the etching effect in terms of surface roughness had the greatest priority, as heat damage from APPJ was excluded in the device developmental stage and another material was not used in this study [ 20 , 22 , 23 ]. Figure 2 (e) shows that a surface roughness change (Ra) after APPJ treatment was not statistically observed (air: 1.94 ± 0.28 μ m, air APPJ: 1.74 ± 0.66 μ m).…”
Section: Resultsmentioning
confidence: 99%
“…Among various plasma effects—such as etching, heat damage, and metallization or polymerization of single materials on the biomaterial surfaces—measurements of the etching effect in terms of surface roughness had the greatest priority, as heat damage from APPJ was excluded in the device developmental stage and another material was not used in this study [ 20 , 22 , 23 ]. Figure 2 (e) shows that a surface roughness change (Ra) after APPJ treatment was not statistically observed (air: 1.94 ± 0.28 μ m, air APPJ: 1.74 ± 0.66 μ m).…”
Section: Resultsmentioning
confidence: 99%
“…5b shows the high resolution infrared spectra within the range 3000-4000 cm −1 . Infrared spectra at 3650 and 3480 are hydroxyl O−H groups, and secondary aromatic amine stretching vibration, respectively [25,28]. These intensities of stretching peak of polyimide treated by plasmas with a helium (P5) and helium-oxygen mixture (P6) were slightly increased compared to the polyimide without plasma treatment.…”
Section: Resultsmentioning
confidence: 99%
“…It was shown that the presence of O species led to the increase of OH on the polyimide surface treated by plasma. Band at the range of 3000-3100 cm −1 corresponds to C−H stretching mode [25]. Hence, the carbon structure of polyimide surface was influenced by plasma treatment as the intensity peak of the treated polyimide increased due to the helium and heliumoxygen mixture plasma treatments.…”
Section: Resultsmentioning
confidence: 99%
“…1,2 Accordingly, they find high value in applications such as microelectronics and space technology. 3,4 Here, surface-mediated properties, both positive and negative, are important, for example, metal/polymer adhesion 5,6 versus ultraviolet (UV) photodegradation in space.…”
Section: Introductionmentioning
confidence: 99%