Synthesis and characterization of barium titanate films on Ti-coated Si substrates by plasma electrolytic oxidation

Oxidation and corrosion effects on virgin copper and silicon substrates under ambient conditions largely restrict their electronic and microelectronic applications in industrial fields. In this paper, we first aimed to fabricate cross‐linked organic thin films on a copper substrate by bombardment with a low‐energy proton beam, thus enhancing the films' anti‐oxidization ability under ambient conditions, as confirmed using X‐ray photoelectron spectroscopy and atomic force microscopy. The anti‐oxidization ability of the cross‐linked polymer films on silicon substrate was also considered. Copyright © 2016 John Wiley & Sons, Ltd.

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Using a low-energy proton beam to cross-link polymer films for the protection of inorganic substrates

Zheng

Zhao

Wang

et al. 2016

Surf. Interface Anal.

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Structure and dielectric properties of barium strontium titanate ferroelectric thin film prepared by DC micro-arc oxidation

Wang

Zuo

et al. 2020

Appl. Phys. A

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Review of plasma electrolytic oxidation of titanium substrates: Mechanism, properties, applications and limitations

Aliofkhazraei

Macdonald

Matykina

et al. 2021

Applied Surface Science Advances

184

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Synthesis and characterization of barium titanate films on Ti-coated Si substrates by plasma electrolytic oxidation

Cited by 8 publications

References 36 publications

Using a low-energy proton beam to cross-link polymer films for the protection of inorganic substrates

Using a low-energy proton beam to cross-link polymer films for the protection of inorganic substrates

Structure and dielectric properties of barium strontium titanate ferroelectric thin film prepared by DC micro-arc oxidation

Review of plasma electrolytic oxidation of titanium substrates: Mechanism, properties, applications and limitations

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