We fabricated solution-processed zinc tin oxide (ZTO) TFTs with sol-gel organic-inorganic hybrid passivation layers owing to their solution-processibility and good water and oxygen barrier property. The sol-gel organic-inorganic hybrid passivation layers reduce hysteresis of the TFTs without deterioration of performance. The gate bias stability and the environmental stability under high temperature and relative humidity are also improved compared to unpassivated and poly(methyl methacrylate) (PMMA) passivated TFTs.Metal oxide semiconductors have attracted considerable attention as the channel layer for thin film transistor (TFT) in displays. 1 Owing to their high electron mobility, good uniformity, and high transparency, oxide TFTs are considered the most promising devices for high performance and large area displays. However, for practical applications, the stability under long term bias stress should be guaranteed. The bias instability of oxide TFTs is attributed to not only charge trapping at the semiconductor/insulator interface but also the external molecules in the ambient atmosphere. [2][3][4][5] In particular, the adsorption/desorption of water and oxygen molecules on the back channel surface is the main reason for the bias instability of common devices with an inverted staggered structure.Oxide TFTs with various passivation layers such as SiO x , SiN x , AlO x , and poly(methyl methacrylate) (PMMA) exhibited improved bias stability due to effective protection from external molecules. [5][6][7][8][9] While inorganic passivation layers have excellent gas barrier properties, they are generally deposited on the oxide channel layer using sputtering, plasma enhanced chemical vapor deposition (PECVD), or e-beam evaporation, which accompany some notable disadvantages. Specially, transistor performance may be degraded by surface damage during film growth and high fabrication costs are inevitable. On the other hand, polymer passivation layers have advantages of a simple and low-cost solution process, but suffer from high permeability to gases. As an alternative, organic-inorganic hybrid materials synthesized by a sol-gel reaction are potentially good passivation layer candidates. 10,11 These materials offer solution-processibility and higher water and oxygen barrier properties than commercially available polymers, since they contain a highly condensed inorganic network with UV and/or thermal polymerizable organic functional groups. In particular, organic-inorganic hybrid materials realized via a nonhydrolytic sol-gel process, where inorganic networks are formed by a condensation reaction without water, can be easily synthesized and exhibit controllable characteristics with a suitable selection of precursors and optimization of processing parameters. 12-16 Moreover, the absence of water molecules and hydroxyl groups in non-hydrolytic sol-gel derived materials can provide higher thermal and chemical stability relative to hydrolytic sol-gel derived materials. Exploiting these advantages, Jung et al. reported high per...