Synthesis of Silicon Carbide Thin Films with Polycarbosilane (PCS)

Abstract

Polycarbosilane (PCS) thin films were deposited on silicon (and other) substrates and heat treated under vacuum (∼10 −6 torr) at temperatures in the range of 200°-1200°C. At temperatures in the range of 1000°-1200°C, the initially amorphous PCS films transformed to polycrystalline ␤-silicon carbide (␤-SiC). Although PCS films could be deposited at thickness up to 2 µm, the films with thicknesses >1 µm could not be transformed to SiC without extensive cracking. The resulting SiC coatings were characterized using Fourier transform infrared spectroscopy, glancingangle X-ray diffractometry, secondary-ion mass spectroscopy, Raman spectoscopy, transmission electron microscopy, and scanning electron microscopy. The temperature and time dependence of the amorphous-to-crystalline transition could be associated with the evolution of free carbon, oxygen, and hydrogen in the films.

Step-Growth Polymerization of Poly(phenylcarbosilane) and Its Structural and Physical Properties

“…In general, the thermal behavior of the carbosilane polymer depends on the environmental conditions. Under inert conditions, the Si-C network of the glass phase is formed with residual carbon [48][49][50]; whereas, under oxidative conditions, the accelerated thermal decomposition of the alkyl groups forms Si-O bonds [9,51,52]. This is confirmed from the EDS analysis after TGA.…”

Corrosion and Oxidation Behavior of Polymer Derived Ceramic Coatings With Passive Glass Fillers on Aisi441 Stainless Steel

“…Polymer derived ceramic (PDC) composite coatings are promising candidates to be used as alternative environmental barrier coatings for corrosion and oxidation protection of metals [12]. A new approach based on development of oxidation resistant PDC coating systems through pyrolysis of suitable predominantly silicon containing precursors such as polysiloxanes [13], polycarbosilanes [14] or polysilazanes [15,16,17], which could act as a diffusion barrier to oxygen was reported. The precursor techniques facilitate relatively low-cost and easy approach to produce polymeric and ceramic coatings, which in turn provide excellent oxidation and corrosion protection of metal substrates.…”

SiC ceramic micropatterns from polycarbosilanes

“…1,2 Polycarbosilane compounds were used for the production of SiC fibres, [3][4][5] thin films, 1,6,7 membranes 8,9 and ceramic matrix composite. 10 Micropatterning of ceramics using polymeric ceramic precursors has gained particular interest due to facile shaping processes and their applications in mechanical devices, energy systems, bioengineering, biomedical science or as catalyst supports.…”