“…Therefore, a deposited film of germanium oxides should now not be considered as a fully complete and final result of some process sequence; instead, it should be considered as a material suitable for subsequent modifications. In particular, based on such layers, one can create light-emitting diodes, photodiodes, optoelectronic couples, optical fibers, interference filters, mirrors, lenses, diffraction gratings and holograms, as well as single electron transistors, memory elements, resists for laser and probe nanolithography, low-k and high-k dielectrics, and a component of colloidal solutions of Ge-nanoparticles to fight against cancer in medicine (Tyurnina et al, 2011). To date, not all device applications of germanium oxide layers have been identified.…”