Technological Aspects in Fabrication of Micro- and Nano-Sized Carbon Based Features: Nanorods, Periodical Arrays and Self-Standing Membranes

Abstract

Diamond and/or carbon thin films are in the center of interest due to their variability and extraordinary combination of intrinsic properties. However, some applications require fabrication of films with tailored properties. Especially, fabrication of periodic structures is highly attractive due to their increased surface area. In this contribution we point out the key technological aspects for fabrication of micro-and nano-sized carbon-based structures. Three representative structures are presented: diamond nanorods, self-assembled templates and self-standing diamond membranes. We found that the diameter of diamond nanorods can be controlled in a broad range from 10 to 200 nm by the masking material (Au vs Ni) and its initial thickness (from few to tens of nanometers). The assembly of polystyrene microspheres in mono-or multi-layer with square or hexagonal periodicities was controlled by the spin-coating parameters. The diamond porous membrane was selectively grown on Si substrate with an interdigital or mesh like geometry. Advantages of each structure as well as the fabrication limitations are discussed more in detail and finally their representative applications are pointed out.K e y w o r d s: diamond, carbon, nanorods, microsphere lithography, selective area deposition, SEM

GROWTH AND PROPERTIES OF DIAMOND FILMS PREPARED ON 4-INCH SUBSTRATES BY CAVITY PLASMA SYSTEMs

“…The representative Raman spectra of the grown diamond films are shown in Figure 3. Raman spectroscopy in all cases indicates the high-quality diamond layer with a strong and sharp peak at 1332 cm -1 , characteristic for microcrystalline diamond films [14,15]. Considering the above SEM morphology this finding was expected.…”

“…Considering the above SEM morphology this finding was expected. Diamond films with crystals as large as 500 nm already demonstrate a negligible amount of graphitic phases [14,15] whilst in the investigated cases, the size of diamond crystals is even larger. In agreement with previous reports, the second order Si peak from the substrate observable in the spectra of thinner diamond films grown in the REC reactor at around 980 cm -1 is diminishing with increasing diamond layer thickness [14,16].…”

“…Diamond films with crystals as large as 500 nm already demonstrate a negligible amount of graphitic phases [14,15] whilst in the investigated cases, the size of diamond crystals is even larger. In agreement with previous reports, the second order Si peak from the substrate observable in the spectra of thinner diamond films grown in the REC reactor at around 980 cm -1 is diminishing with increasing diamond layer thickness [14,16]. However, the photoluminescence tail remains high even for thick films indicating "parasitic doping" due to plasma contact with quartz bell jar [5].…”

Determination of temperature dependent parameters of zero-phonon line in photo-luminescence spectrum of silicon-vacancy centre in CVD diamond thin films

“…Such uses require controllable fabrication of structures (single diamond crystals, nanorods, periodic structures, etc.) [8][9][10]. Negatively charged silicon-vacancy (SiV) centres in diamond belong to the group of colour centres in diamond that are prospective for photonic applications as single photon sources and fluorescent markers for bio-imaging.…”

Fabrication of Structured Boron-Doped Diamond Films for Electrochemical Applications

“…The surface morphology of as-grown diamond films reveals crystals with diameter of 600-900 nm. The surface of diamond film was further structured either by reactive ion etching (RIE) in oxygen based gas mixture (O2 or CF4/O2) employing the gold nanoclusters as the masking material ( Figure 1a-c) [8] or by thermo-catalytically driven reactions of nickel nanoclusters with the diamond surface ( Figure 1a,b,d).…”