We report a successful approach in fabricating well shape two‐dimensional Au nanocluster hexagonal array on an Si(111)‐7 × 7 surface. The size of Au hexagons is about 2.5 × 2.5 nm2. The easiness of preparing large scale Au hexagonal array makes this approach usable to fabricate a wide range of other metal nanocluster arrays. Further deposition of small amount of Au nanoclusters on the Au hexagonal array surface will prefer to occupy the holes of the hexagonal array at room temperature. Finally, a reasonable structure of formatting the hexagonal Au nanocluster array on the Si(111)‐7 × 7 surface was proposed. Copyright © 2015 John Wiley & Sons, Ltd.